Fabrication of Aluminum Interdigitated Electrode for Biosensor Application Using Conventional Lithography

M.A. Farehanim; U. Hashim; Norhayati Soin; A.H. Azman; S. Norhafizah; M.F. Fatin; Mat Ayub Ramzan

doi:10.4028/www.scientific.net/AMR.1109.118

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 1109Fabrication of Aluminum Interdigitated Electrode...

Fabrication of Aluminum Interdigitated Electrode for Biosensor Application Using Conventional Lithography

Abstract:

A simple technique for the fabrication of interdigitated electrode (IDEs) using conventional lithography was presented. A top-down simple lithography approach was used to fabricate a set of Interdigitated electrodes were patterned with aluminum metal. Silicon dioxide serves to isolate the electrode from the substrate. A chrome mask was proposed to complete this work. In this work, the proposed method was experimentally demonstrated by fabricating the IDEs structure 4-5μm, approximately. The dimensions of structure were determined by using scanning electron microscopy (SEM). It is a simple, easy-to-use and cost effective method and does not require complicated micro-lithography process for fabricating desired microelectrode in reproducible approach.

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Periodical:

Advanced Materials Research (Volume 1109)

Pages:

118-122

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.1109.118

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Online since:

June 2015

Authors:

M.A. Farehanim*, U. Hashim, Norhayati Soin, A.H. Azman, S. Norhafizah, M.F. Fatin, Mat Ayub Ramzan

Keywords:

Interdigitated Electrode, Lithography Process, Scanning Electron Microscopy, Simple Fabrication

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* - Corresponding Author

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