Ultrasonic Machining: A Review

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Abstract:

Ultrasonic machining is a contemporary manufacturing method usually employed for processing materials with higher hardness/brittleness such as quartz, semiconductor materials, ceramics etc. The machined surface produced by ultrasonic machining is found to be free from any surface defects (heat affected zone, cracks, recast layer, etc.) in contrast to the thermal based machining processes like; electric discharge machining, laser beam machining etc. In this article, a review has been reported on the fundamental principle of ultrasonic machining, effect of operating parameters on material removal rate, tool wear rate, surface roughness and hole quality. It also presents a brief review on micro-USM, rotary USM and hybrid methods with other processes.

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61-78

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June 2016

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[1] J. Kumar, Ultrasonic machining - A compressive review, Machining Science and Technology: An International Journal 17 (3) (2013) 325–379.

Google Scholar

[2] T.B. Thoe, D.K. Aspiwall, M.L.H. Wise, Review on ultrasonic machining, International Journal of Machine Tools Manufacture 38 (4) (1998) 239–255.

DOI: 10.1016/s0890-6955(97)00036-9

Google Scholar

[3] R. Kataria, J. Kumar, B.S. Pabla, Experimental investigation into the hole quality in ultrasonic machining of WC-Co composite, Materials and Manufacturing Processes XX (2015) 1–13. DOI: 10. 1080/10426914. 2014. 995052.

DOI: 10.1080/10426914.2014.995052

Google Scholar

[4] SONIC-MILL 500W model Instruction Manual for Stationary Ultrasonic Machining, Albuquerque, (2002) NM, USA.

Google Scholar

[5] G.K. Dhuria, R. Singh, R. A. Batish, Ultrasonic machining of titanium and its alloys: a state of art review and future prospective, International Journal Machining and Machinability of Materials 10 (4) (2011) 326–355.

DOI: 10.1504/ijmmm.2011.043088

Google Scholar

[6] G.S. Kainth, A. Nandy, K. Singh, On the mechanisms of material removal in ultrasonic machining, International Journal of Machine Tool Design 19 (1979) 33–41.

DOI: 10.1016/0020-7357(79)90019-2

Google Scholar

[7] T.C. Lee, C.W. Chan, Mechanism of the ultrasonic machining of ceramic composites, Journal of Materials Processing Technology 71 (1997) 195–201.

DOI: 10.1016/s0924-0136(97)00068-x

Google Scholar

[8] G.E. Miller, Special theory of ultrasonic machining, Journal of Applied Physics 28(2) (1975) 149–156.

Google Scholar

[9] M.C. Shaw, Ultrasonic grinding, Annals of CIRP 5 (1956) 25–53.

Google Scholar

[10] H. Lalchnuanvela, B. Doloi, B. Bhattacharya, Enabling and understanding ultrasonic machining of engineering ceramics using parametric analysis, Materials and Manufacturing Processes 27(4) (2012) 443–448.

DOI: 10.1080/10426914.2011.585497

Google Scholar

[11] C. Sahay, S. Ghosh, H.K. Kammila, Analysis of ultrasonic machining using Monte Carlo simulation. Proceedings of the ASME 2011 International Mechanical Engineering Congress & Exposition, November 11–17, 2011, Denver, Colorado, USA.

DOI: 10.1115/imece2011-63240

Google Scholar

[12] J. Kumar, J.S. Khamba, Modeling the material removal rate in ultrasonic machining of titanium using dimensional analysis, International Journal of Advanced Manufacturing Technology 48(1/4) (2010) 103–119.

DOI: 10.1007/s00170-009-2287-1

Google Scholar

[13] M. Komaraiah, P.N. Reddy, A study on the influence of work piece properties in ultrasonic machining, International Journal of Machine Tools and Manufacture 33 (1993) 495–505.

DOI: 10.1016/0890-6955(93)90055-y

Google Scholar

[14] V. Kumar, J.S. Khamba, Parametric optimization of ultrasonic machining of co-based super alloy using the Taguchi multi-objective approach, Production Engineering Research and Development 3 (2009) 417–425.

DOI: 10.1007/s11740-009-0189-6

Google Scholar

[15] R.S. Jadoun, P. Kumar, B.K. Mishra, R.C.S. Mehta, Optimization of process parameters for ultrasonic drilling (USD) of advanced engineering ceramics using Taguchi approach, Engineering Optimization 38(7) (2006) 771–787.

DOI: 10.1080/03052150600733962

Google Scholar

[16] R. Singh, J.S. Khamba, Investigation for ultrasonic machining of titanium and its alloys, Journal of Materials Processing Technology 183 (2007) 363–367.

DOI: 10.1016/j.jmatprotec.2006.10.026

Google Scholar

[17] J. Deng, T. Lee, Ultrasonic machining of alumina based ceramic composites, Journal of the European Ceramic Society 22(8) (2002) 1235–1241.

DOI: 10.1016/s0955-2219(01)00437-x

Google Scholar

[18] V. Kumar, J.S. Khamba, An investigation into the ultrasonic machining of co-based super alloy using the taguchi approach, International Journal Machining and Machinability of Materials 7 (¾) (2010) 230-243.

DOI: 10.1504/ijmmm.2010.033068

Google Scholar

[19] J. Kumar, J.S. Khamba, Multi-Response optimization in ultrasonic machining of titanium using Taguchi's approach and utility concept, International Journal of Manufacturing Research 5(2) (2010) 139-159.

DOI: 10.1504/ijmr.2010.031629

Google Scholar

[20] R. Singh, J.S. Khamba, Macro-model for ultrasonic machining of titanium and its alloys: designed experiments, Journal of Engineering Manufacture 221 (2007) 221–235.

DOI: 10.1243/09544054jem593

Google Scholar

[21] V. Kumar, J.S. Khamba, Statistical analysis of experimental parameters in ultrasonic machining of tungsten carbide using the Taguchi approach, Journal of the American Ceramic Society 91 (2008) 92–96.

DOI: 10.1111/j.1551-2916.2007.02107.x

Google Scholar

[22] V. Kumar, J.S. Khamba, Experimental Investigation of Ultrasonic Machining of an Alumina-Based Ceramic Composite, Journal of the American Ceramic Society 89 (8) (2006) 2413–2417.

DOI: 10.1111/j.1551-2916.2006.01085.x

Google Scholar

[23] R. Singh, Study of statistically controlled surface roughness solution in machining of titanium alloys using ultrasonic machining, International Journal of Engineering Systems Modelling and Simulation 2 (3) (2010) 149–153.

DOI: 10.1504/ijesms.2010.035109

Google Scholar

[24] R.S. Jadoun, P. Kumar, B.K. Mishra, R.C.S. Mehta, Optimisation of MRR in ultrasonic drilling (USD) based on Taguchi's robust design methodology, International Journal Machining and Machinability of Materials 1(4) (2006) 445– 462.

DOI: 10.1504/ijmmm.2006.012352

Google Scholar

[25] M. Adithan, The hardening mechanism of tools in ultrasonic drilling-an investigation by an X-ray diffraction technique, Tribology International 21 (3) (1988) 163–168.

DOI: 10.1016/0301-679x(88)90051-5

Google Scholar

[26] M.S. Koval Chenko, A.V. Paustovskii, V.A. Perevyazko, Influence of properties of abrasive materials on the effectiveness of ultrasonic machining of ceramics, Academy of Science of the Ukrainian SSR 283 (1986) 35–38.

DOI: 10.1007/bf00792360

Google Scholar

[27] H. Dam, P. Quist, M. Schreiber, Productivity, surface quality and tolerances in ultrasonic machining of ceramics, Journal of Materials Processing Technology 51(1/4) (1995) 358–368.

DOI: 10.1016/0924-0136(94)01587-q

Google Scholar

[28] R. Singh, J.S. Khamba, Taguchi technique for modeling material removal rate in ultrasonic machining of titanium. Materials Science and Engineering, 460–461(2007) 365–369.

DOI: 10.1016/j.msea.2007.01.093

Google Scholar

[29] S.B. Bhosale, R.S. Pawade, P.K. Brahmankar, Effect of process parameters on MRR, TWR and surface topography in ultrasonic machining of alumina-zirconia ceramic composite, Ceramics International l40 (2014) 12831–12836.

DOI: 10.1016/j.ceramint.2014.04.137

Google Scholar

[30] J. Kumar, V. Kumar, Evaluating the Tool Wear Rate in Ultrasonic Machining of Titanium using Design of Experiments Approach, World Academy of Science Engineering and Technology 81 (2011) 803–808.

Google Scholar

[31] J. Kumar, J.S. Khamba, S.K. Mohapatra, Investigating and modeling tool-wear rate in the ultrasonic machining of titanium, International Journal of Advanced Manufacturing Technology 41(11) (2009) 1101–1111.

DOI: 10.1007/s00170-008-1556-8

Google Scholar

[32] H. Hocheng, K.L. Kuo, J.T. Lin, Machinability of zirconia ceramics in ultrasonic drilling, Materials and Manufacturing Processes 14(5) (1999) 713–724.

DOI: 10.1080/10426919908914864

Google Scholar

[33] R. Singh, J.S. Khamba, Comparison of slurry effect on machining characteristics of titanium in ultrasonic drilling, Journal of Materials Processing Technology 197(1/3) (2008) 200–205.

DOI: 10.1016/j.jmatprotec.2007.06.026

Google Scholar

[34] M.A. Majeed, L. Vijayaraghvan, S.K. Malhotra, R. KrishnaMurthy, Ultrasonic machining of Al2O3/LaPO4 composites, International Journal of Machine Tools & Manufacture 48 (2008) 40–46.

DOI: 10.1016/j.ijmachtools.2007.07.012

Google Scholar

[35] J. Kumar, J.S. Khamba, An experimental study on ultrasonic machining of pure titanium using designed experiments, Journal of the Brazilian Society of Mechanical Sciences and Engineering 30 (3) (2008) 231–238.

DOI: 10.1590/s1678-58782008000300008

Google Scholar

[36] J. Kumar, J.S. Khamba, S.K. Mohapatra, An investigation into the machining characteristics of titanium using ultrasonic machining, International Journal of Machining and Machinabaility of Materials 3(1/2) (2008) 143–161.

DOI: 10.1504/ijmmm.2008.017631

Google Scholar

[37] M. Ramulu, Ultrasonic machining effects on the surface finish and strength of silicon carbide ceramics, International Journal of Manufacturing Technology Management 7 (2/3/4) (2005) 107–125.

DOI: 10.1504/ijmtm.2005.006826

Google Scholar

[38] R. Singh, J.S. Khamba, Effect of toughness on machining characteristics in ultrasonic assisted drilling, Manufacturing Technology Today XXX (2006) 11-14.

Google Scholar

[39] M. Komaraiah, M.A. Manan, P.N. Reddy, S. Victor, Investigation of surface roughness and accuracy in ultrasonic machining, Precision Engineering, 10(2) (1988) 59–68.

DOI: 10.1016/0141-6359(88)90001-3

Google Scholar

[40] M. Adithan, Tool Wear Studies In Ultrasonic Drilling, Wear 29 (1974) 81-93.

DOI: 10.1016/0043-1648(74)90136-7

Google Scholar

[41] R.S. Jadoun, P. Kumar, B.K. Mishra, Taguchi's optimization of process parameters for production accuracy in ultrasonic drilling of engineering ceramics, Production Engineering Research and Development 3 (2009) 243–253.

DOI: 10.1007/s11740-009-0164-2

Google Scholar

[42] M. Komariah, P.N. Reddy, Relative performance of tool materials in ultrasonic machining, Wear 161(1/2) (1993) 1–10.

DOI: 10.1016/0043-1648(93)90446-s

Google Scholar

[43] A. Dvivedi, P. Kumar, Surface quality evaluation in ultrasonic drilling through the Taguchi technique, International Journal of Advanced Manufacturing Technology 34 (1/2) (2007) 131–140.

DOI: 10.1007/s00170-006-0586-3

Google Scholar

[44] P.L. Guzzo, A.A. Raslan, J.D.B. De Mello, Ultrasonic abrasion of quartz crystals, Wear 255 (2003) 67–77.

DOI: 10.1016/s0043-1648(03)00094-2

Google Scholar

[45] J. Kumar, J.S. Khamba, An Investigation into the effect of work material properties, tool geometry and abrasive properties on performance indices of ultrasonic machining, International Journal of Machining and Machinability of Materials 5(2/3) (2009).

DOI: 10.1504/ijmmm.2009.023399

Google Scholar

[46] M. Adithan, Production accuracy of holes in ultrasonic drilling, Wear 40(3) (1976) 309–318.

DOI: 10.1016/0043-1648(76)90122-8

Google Scholar

[47] R. Singh, J.S. Khamba, Mathematical modeling of tool wear rate in ultrasonic machining of titanium, International Journal of Advanced Manufacturing Technology 43 (2009) 573–580.

DOI: 10.1007/s00170-008-1729-5

Google Scholar

[48] J. Kumar, Investigation into the surface quality and micro-hardness in the ultrasonic machining of titanium (ASTM GRADE-1), Journal of the Brazilian Society of Mechanical Sciences and Engineering 36 (2014) 807–823.

DOI: 10.1007/s40430-014-0130-6

Google Scholar

[49] M.S. Cheema, A. Dvivedi, A.K. Sharma, A hybrid approach to multi criteria optimization based on user's preference rating, Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 227 (2013) 1733–1742.

DOI: 10.1177/0954405413491958

Google Scholar

[50] V. Jain, A.K. Sharma, P. Kumar, Recent developments and research issues in microultrasonic machining, International Scholarly Research Network 2011: 1–15.

DOI: 10.5402/2011/413231

Google Scholar

[51] H. Zarepour, S.H. Yeo, Predictive modeling of material removal modes in micro ultrasonic machining, International Journal of Machine Tools & Manufacture 62 (2012) 13–23.

DOI: 10.1016/j.ijmachtools.2012.06.005

Google Scholar

[52] A. Gupta, J.S. Mehta, R. Madan, Micro ultrasonic machining: A brief outlook. International Conference on Emerging Trends in Engineering and Technology (2013) 287–292.

Google Scholar

[53] Z. Yu, C. Ma, C. An, J. Li, D. Guo, Prediction of tool wear in micro USM, CIRP Annals – Manufacturing Technology 61 (2012) 227–230.

DOI: 10.1016/j.cirp.2012.03.060

Google Scholar

[54] Z. Yu, K.P. Rajurkar, A. Tandon, Study of 3D Micro-Ultrasonic Machining, Journal of Manufacturing Science and Engineering 126 (2004) 727–732.

DOI: 10.1115/1.1813482

Google Scholar

[55] H. Zarepour, S.H. Yeo, P.C. Tan, E. Aligiri, A new approach for force measurement and workpiece clamping in micro-ultrasonic machining, International Journal of Advanced Manufacturing Technology 53 (2011) 517–522.

DOI: 10.1007/s00170-010-2845-6

Google Scholar

[56] W. H. Fan, C. L. Chao, W. C. Chou, T. T. Chen, C. W. Chao, Study on the Surface Integrity of Micro-Ultrasonic Machined Glass-Ceramic Material, Key Engineering Materials 407-408 (2009) 731–734.

DOI: 10.4028/www.scientific.net/kem.407-408.731

Google Scholar

[57] V. Jain, A.K. Sharma, P. Kumar, Investigations on tool wear in micro ultrasonic machining, Applied Mechanics and Materials 110-116 (2012) 1561–1566.

DOI: 10.4028/www.scientific.net/amm.110-116.1561

Google Scholar

[58] N.J. Churi, Z.J. Pei, C. Treadwell, Rotary ultrasonic machining of titanium alloy: Effects of machining variables, Machining Science and Technology 10(3) (2006) 301–321.

DOI: 10.1080/10910340600902124

Google Scholar

[59] M.H. Lee, I. Sudin, G.E. Ken, A. Zaharim, Parameters optimization of rotary ultrasonic machining of glass lens for surface roughness using statistical taguchi's experimental design. International Conference on Applied Mathematics (2008) 214–219.

Google Scholar

[60] J. Liu, D. Zhang, L. Qin, L. Yan, Feasibility study of the rotary ultrasonic elliptical machining of carbon fiber reinforced plastics (CFRP), International Journal of Machine Tools & Manufacture 53 (2012) 141–150.

DOI: 10.1016/j.ijmachtools.2011.10.007

Google Scholar

[61] W.L. Cong, Z.J. Pei, T.W. Deines, A. Srivastava, L. Riley, C. Treadwell, Rotary ultrasonic machining of CFRP composites: A study on power consumption, Ultrasonics, 52(8) (2012) 1030–1037.

DOI: 10.1016/j.ultras.2012.08.007

Google Scholar

[62] J. Wu, W. Cong, R.E. Williams, Z.J. Pei, Dynamic process modelling for rotary ultrasonic machining of alumina, Journal of Manufacturing Science and Engineering (2011) 133.

DOI: 10.1115/1.4004688

Google Scholar

[63] Z.C. Li, Y. Jiaoa, T.W. Deinesa, Z.J. Pei, Rotary ultrasonic machining of ceramics matrix composites: feasibility study and designed experiments, International Journal of Machine Tools and Manufacture 45(12/13) (2005) 1402–1411.

DOI: 10.1016/j.ijmachtools.2005.01.034

Google Scholar

[64] Z.J. Pei, P.M. Ferreira, Modeling of ductile-mode material removal in rotary ultrasonic machining, International Journal of Machine Tools and Manufacture 38(10/11) (1998) 1399–1418.

DOI: 10.1016/s0890-6955(98)00007-8

Google Scholar

[65] W.M. Zeng, Z.C. Li, Z.J. Pei, C. Treadwell, Experimental observation of tool wear in rotary ultrasonic machining of advanced ceramics, International Journal of Machine Tools and Manufacture, 45 (2005) 1468–1473.

DOI: 10.1016/j.ijmachtools.2005.01.031

Google Scholar

[66] P. Hu, J.M. Zhang, Z.J. Pei, C. Treadwell, Modeling of material removal rate in rotary ultrasonic machining: designed experiments, Journal of Materials Processing Technology 129 (2002) 339–344.

DOI: 10.1016/s0924-0136(02)00686-6

Google Scholar

[67] Y. Jiao, W.J. Liu, Z.J. Pei, X.J. Xin, C. Treadwell, Study on edge chipping in rotary ultrasonic machining of ceramics: An integration of designed experiments and finite elements analysis. Journal of Manufacturing Science and Engineering. 127 (2005).

DOI: 10.1115/1.2034511

Google Scholar

[68] W.L. Cong, Z.J. Pei, N. Mohanty, E. Van Vleet, C. Treadwell, Vibration Amplitude in Rotary Ultrasonic Machining: A Novel measurement method and effects of process variables, Journal of Manufacturing Science and Engineering, 133 (2011).

DOI: 10.1115/1.4004133

Google Scholar

[69] Z.J. Pei, D. Prabhakar, P.M. Ferreira, M. Haselkorn, A mechanistic approach to the prediction of material removal rates in rotary ultrasonic machining, Journal of Engineering for Industry, 117 (1995) 142–151.

DOI: 10.1115/1.2803288

Google Scholar

[70] J. Shen, Z.J. Pei, E.S. Lee, Support vector fuzzy adaptive network in the modeling of material removal rate in rotary ultrasonic machining, Journal of Manufacturing Science and Engineering 130 (2008) 1–8.

DOI: 10.1115/1.2951935

Google Scholar

[71] Z.C. Li, T. Sisco, Z.J. Pei, A.C. Micale, C. Treadwell, Experimental study on rotary ultrasonic machining of graphite/epoxy panel, Proceedings of the ASPE 2007 Spring Topical Meeting on Vibration Assisted Machining Technology Chapel Hill, NC, April 16–17 (2007).

Google Scholar

[72] G. Ya, H.W. Quin, S.C. Yang, Analysis of rotary ultrasonic machining mechanism, Journal of Materials Processing Technology 129(1/3) (2002) 182–185.

DOI: 10.1016/s0924-0136(02)00638-6

Google Scholar

[73] D. Liu, W.L. Cong, Z.J. Pei, Y. Tang, A cutting force model for rotary ultrasonic machining of brittle materials, International Journal of Machine Tools & Manufacture 52 (2012) 77–84.

DOI: 10.1016/j.ijmachtools.2011.09.006

Google Scholar

[74] Z.C. Li, L.W. Cai, Z.J. Pei, C. Treadwell, Edge chipping reduction in rotary ultrasonic machining of ceramics: finite element analysis and experimental verification, International Journal of Machine Tools and Manufacture 46(12/13) (2005).

DOI: 10.1016/j.ijmachtools.2005.09.002

Google Scholar

[75] Q. Wang, W. Cong, Z.J. Pei, H. Gao, R. Kang, Rotary ultrasonic machining of dihydrogen phosphate (KDP) crystal: An experimental investigation on surface roughness, Journal of Manufacturing Processes 11 (2009) 66–73.

DOI: 10.1016/j.jmapro.2009.09.001

Google Scholar

[76] Y.C. Lin, B.H. Yan, Y.S. Chang, Machining characteristics of titanium alloy (Ti-6Al-4V) using a combination process of EDM with USM, Journal of Materials Processing Technology 104 (2000) 171–177.

DOI: 10.1016/s0924-0136(00)00539-2

Google Scholar

[77] Z. Wansheng, Z. Wang, D. Shichun, C. Guanxin, Ultrasonic and electric discharge machining to deep and small hole on titanium alloy, Journal of Materials Processing Technology 120 (2002) 101–106.

DOI: 10.1016/s0924-0136(01)01149-9

Google Scholar

[78] C. Yan, H. Biing, Surface modification of Al-Zn-Mg alloy using the combined process of EDM and USM, Journal of Materials Processing Technology 115(3) (2001) 359–366.

DOI: 10.1016/s0924-0136(01)01017-2

Google Scholar

[79] J. Zhinxin, J.H. Zhang, A. Xing, Combined machining of USM and EDM for advanced ceramics, Journal of Advanced Materials 26(3) (1995) 1620.

Google Scholar

[80] R.C. Sharman, P. Bowen, D.K. Aspinwall, Ultrasonic assisted turning of gamma titanium aluminide, Proceedings of 13th International Symposium for Electromachining Spain Part I (2001) 939–951.

Google Scholar

[81] V.I. Babitsky, A.V. Mitrofanov, V.V. Silverschmidt, Ultrasonically assisted turning of aviation materials: simulations and experimental study, Ultrasonics, 42 (2004) 81–86.

DOI: 10.1016/j.ultras.2004.02.001

Google Scholar

[82] S.M.K. Tabatabaei, S. Behbahani, S.M. Mirian, Analysis of ultrasonic assisted machining (UAM) on regenerative chatter in turning, Journal of Materials Processing Technology 213 (2013) 418–425.

DOI: 10.1016/j.jmatprotec.2012.09.018

Google Scholar

[83] S. Chang, G.M. Bone, Burr size reduction in drilling by ultrasonic assistance, Robotics and Computer-Integrated Manufacturing 120 (2005) 442–450.

DOI: 10.1016/j.rcim.2004.11.005

Google Scholar

[84] B. Azarhoushang, J. Akbari, Ultrasonic assisted drilling of Inconel 738-LC, International Journal of Machine Tools and Manufacture 47 (2007) 1027–1033.

DOI: 10.1016/j.ijmachtools.2006.10.007

Google Scholar

[85] J. Pujana, A. Rivero, A. Celaya, L.N. Lopez de Lacalle, Analysis of ultrasonic-assisted drilling of Ti6Al4V, International Journal of Machine Tools and Manufacture 49 (2009) 500–508.

DOI: 10.1016/j.ijmachtools.2008.12.014

Google Scholar

[86] W.S. Lau, T.M. Yue, M. Wang, Ultrasonic-aided laser drilling of aluminium based metal matrix composites, Annals of the CIRP 43 (1994) 177–182.

DOI: 10.1016/s0007-8506(07)62190-8

Google Scholar

[87] Z. Liang, Y. Wu, X. Wang, W. Zhao, A new two dimensional ultrasonic assisted grinding (UAG) method and its fundamental performance in monocrystal silicon machining, International Journal of Machine Tools and Manufacture 50 (2010) 728–736.

DOI: 10.1016/j.ijmachtools.2010.04.005

Google Scholar

[88] N.G. Mohsen, M.G. Mohammed, A. Javed, Ultrasonic Assisted Grinding of Ti6Al4V alloy, Procedia CIRP, 1 (2012) 353–358.

DOI: 10.1016/j.procir.2012.04.063

Google Scholar

[89] J.P. Choi, B.H. Jeon, B.H. Kim, Chemical-assisted ultrasonic machining of glass, Journal of Materials Processing Technology 191 (2007) 153–156.

DOI: 10.1016/j.jmatprotec.2007.03.017

Google Scholar