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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 121-122On the Oriented Growth and Optical Property of ZnO...

On the Oriented Growth and Optical Property of ZnO Thin Films Deposited on NaCl (001) Substrate by Ion Beam Sputtering

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Abstract:

Temperature dependent oriented growth of ZnO thin film deposited on NaCl (001) substrates using ion beam sputtering was studied by transmission electron microscopy (TEM). Thin films showing a texture due to parallel epitaxy with NaCl (001) as deposited at 100 oC, whereas thin films deposited at 400 oC can form a texture. The microstructure and the epitaxial relationship with the NaCl (001) plane were studied by a high-resolution TEM. The possible causes for the orientation changed with temperature are discussed. The optical transparency of the nanofilms grown from room temperature to 400 oC was measured.

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Nanotechnology and Computer Engineering

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Periodical:

Advanced Materials Research (Volumes 121-122)

Pages:

52-57

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.121-122.52

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Online since:

June 2010

Authors:

Shih Wei Mao, Jung Hsiung Shen, Der Shin Gan, Hsing Lu Huang, Sung Wei Yeh

Keywords:

Ion Beam Sputtering, TEM, Zinc Oxide (ZnO)

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© 2010 Trans Tech Publications Ltd. All Rights Reserved

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