Dynamic Optimum of the MEMS Micro-Deformable Mirror for Food Safety Detection
As the important elements in adaptive optical system used for food safety detection instrument, Micro-deformable mirrors are typical Microelectromechanical systems (MEMS). This paper focuses on the structural optimization of the MEMS Micro-deformable mirror. With the method of finite method analysis, the dynamic characteristics of the micro-mirror are studied by the analysis of modal and frequency respond. The random vibration analysis followed shows the optimized structure parameters of the micro-mirror are effective to improve the dynamic performance of the mirror.
Donald C. Wunsch II, Honghua Tan, Dehuai Zeng, Qi Luo
Y. J. Gong et al., "Dynamic Optimum of the MEMS Micro-Deformable Mirror for Food Safety Detection", Advanced Materials Research, Vols. 121-122, pp. 69-73, 2010