Dynamic Optimum of the MEMS Micro-Deformable Mirror for Food Safety Detection

Yan Jue Gong; Zhao Fu; Hui Yu Xiang; Li Zhang; Chun Ling Meng

doi:10.4028/www.scientific.net/AMR.121-122.69

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 121-122Dynamic Optimum of the MEMS Micro-Deformable...

Dynamic Optimum of the MEMS Micro-Deformable Mirror for Food Safety Detection

Abstract:

As the important elements in adaptive optical system used for food safety detection instrument, Micro-deformable mirrors are typical Microelectromechanical systems (MEMS). This paper focuses on the structural optimization of the MEMS Micro-deformable mirror. With the method of finite method analysis, the dynamic characteristics of the micro-mirror are studied by the analysis of modal and frequency respond. The random vibration analysis followed shows the optimized structure parameters of the micro-mirror are effective to improve the dynamic performance of the mirror.

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Periodical:

Advanced Materials Research (Volumes 121-122)

Pages:

69-73

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.121-122.69

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Online since:

June 2010

Authors:

Yan Jue Gong, Zhao Fu, Hui Yu Xiang, Li Zhang, Chun Ling Meng

Keywords:

Dynamic Optimum, MEMS Micro-Deformable Mirror, Modal Analysis

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References

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