Dynamic Optimum of the MEMS Micro-Deformable Mirror for Food Safety Detection

Abstract:

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As the important elements in adaptive optical system used for food safety detection instrument, Micro-deformable mirrors are typical Microelectromechanical systems (MEMS). This paper focuses on the structural optimization of the MEMS Micro-deformable mirror. With the method of finite method analysis, the dynamic characteristics of the micro-mirror are studied by the analysis of modal and frequency respond. The random vibration analysis followed shows the optimized structure parameters of the micro-mirror are effective to improve the dynamic performance of the mirror.

Info:

Periodical:

Advanced Materials Research (Volumes 121-122)

Edited by:

Donald C. Wunsch II, Honghua Tan, Dehuai Zeng, Qi Luo

Pages:

69-73

DOI:

10.4028/www.scientific.net/AMR.121-122.69

Citation:

Y. J. Gong et al., "Dynamic Optimum of the MEMS Micro-Deformable Mirror for Food Safety Detection", Advanced Materials Research, Vols. 121-122, pp. 69-73, 2010

Online since:

June 2010

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Price:

$35.00

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