Fe100-xPtx single-layered films with Pt contents (x) = 32~69 at.% were deposited on natural-oxidized Si(100) substrate by dc magnetron sputtering. Then the films were post-annealed at 700 °C for 3 min by a rapid thermal annealing (RTA) with a high heating ramp rate of 100 °C/sec. Experimental results show that FePt film presented (111) preferred orientation and tended to in-plane magnetic anisotropy as the content of Pt was 32 at.%. When the Pt content was increased to 55 at.%, (001)-textured FePt film was obtained and presented perpendicular magnetic anisotropy. Its out-of-plane coercivity (Hc⊥), saturation magnetization (Ms) and out-of-plane squareness (S⊥) reached to 12.7 kOe, 375 emu/cm3 and 0.8, respectively. These results reveal its significant potential as perpendicular magnetic recording media for high-density recording. Further increasing the Pt content to 69 at.%, the coercivity of FePt film was decreased drastically to below 1 kOe and tended towards in-plane magnetic anisotropy.