The Design of Three-Dimensional Vibration Sensor Based on SOI Microfabbrication

Abstract:

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Compared with the traditional vibration sensors, the micro-vibration sensor have many advantages, such as small size, high sensitivity and low noise which is based on micro-fabbrication.This paper introduced the micro-vibration sensors which sensitive structure are cilium and micro-elastic beams. The micro-vibration sensors were produced by the inductively coupled plasma technology (ICP), the maximal etching depth of which can be greater than 300μm, the thickness of beam is less than 20μm and the longth of cilium are more than 3000um.The sensitivity of the sensor is 102.5μV/g, the measurement range to +20g, and the resonant frequency is 2KHz.

Info:

Periodical:

Advanced Materials Research (Volumes 148-149)

Edited by:

Xianghua Liu, Zhengyi Jiang and Jingtao Han

Pages:

152-156

DOI:

10.4028/www.scientific.net/AMR.148-149.152

Citation:

G. X. Shi et al., "The Design of Three-Dimensional Vibration Sensor Based on SOI Microfabbrication", Advanced Materials Research, Vols. 148-149, pp. 152-156, 2011

Online since:

October 2010

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Price:

$35.00

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