A Novel Sensorless Control of a Two-Axis Planar Motion Stage for Precision Positioning

Abstract:

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In this study, a novel sensorless control to yield sub-micron precision positioning performance and low cost has been introduced to a Sawyer motor-based two-axis planar motion stage. The experiment results have verified the effectiveness of the suggested strategy for the stage.

Info:

Periodical:

Advanced Materials Research (Volumes 189-193)

Edited by:

Zhengyi Jiang, Shanqing Li, Jianmin Zeng, Xiaoping Liao and Daoguo Yang

Pages:

4121-4125

DOI:

10.4028/www.scientific.net/AMR.189-193.4121

Citation:

S. Y. Dian et al., "A Novel Sensorless Control of a Two-Axis Planar Motion Stage for Precision Positioning", Advanced Materials Research, Vols. 189-193, pp. 4121-4125, 2011

Online since:

February 2011

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Price:

$35.00

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