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A Novel Sensorless Control of a Two-Axis Planar Motion Stage for Precision Positioning
Abstract:
In this study, a novel sensorless control to yield sub-micron precision positioning performance and low cost has been introduced to a Sawyer motor-based two-axis planar motion stage. The experiment results have verified the effectiveness of the suggested strategy for the stage.
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Pages:
4121-4125
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Online since:
February 2011
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© 2011 Trans Tech Publications Ltd. All Rights Reserved
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