A Novel Sensorless Control of a Two-Axis Planar Motion Stage for Precision Positioning

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Abstract:

In this study, a novel sensorless control to yield sub-micron precision positioning performance and low cost has been introduced to a Sawyer motor-based two-axis planar motion stage. The experiment results have verified the effectiveness of the suggested strategy for the stage.

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Periodical:

Advanced Materials Research (Volumes 189-193)

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4121-4125

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Online since:

February 2011

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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