A Novel Sensorless Control of a Two-Axis Planar Motion Stage for Precision Positioning
In this study, a novel sensorless control to yield sub-micron precision positioning performance and low cost has been introduced to a Sawyer motor-based two-axis planar motion stage. The experiment results have verified the effectiveness of the suggested strategy for the stage.
Zhengyi Jiang, Shanqing Li, Jianmin Zeng, Xiaoping Liao and Daoguo Yang
S. Y. Dian et al., "A Novel Sensorless Control of a Two-Axis Planar Motion Stage for Precision Positioning", Advanced Materials Research, Vols. 189-193, pp. 4121-4125, 2011