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High-Efficiency SOI Photodetector Utilizing Surface Plasmon Resonance in Gold Corrugated Structure

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Abstract:

We have investigated the absorption spectra of silicon-on-insulator (SOI) photodiode with Au thin film which is corrugated by SiO2 line-and-space structure. It is aimed for the high-efficiency of SOI absorption by surface plasmon resonance. The structural parameters such as SiO2 thickness, period of corrugation, and the duty-ratio were optimized by FDTD simulation.

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Periodical:

Advanced Materials Research (Volume 222)

Pages:

154-157

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.222.154

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Online since:

April 2011

Authors:

Atsushi Ono, Hiroaki Satoh, Hiroshi Inokawa

Keywords:

Photodiode, Silicon-on-Insulator (SOI), Surface Plasmon Resonance (SPR)

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© 2011 Trans Tech Publications Ltd. All Rights Reserved

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