High-Efficiency SOI Photodetector Utilizing Surface Plasmon Resonance in Gold Corrugated Structure

Abstract:

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We have investigated the absorption spectra of silicon-on-insulator (SOI) photodiode with Au thin film which is corrugated by SiO2 line-and-space structure. It is aimed for the high-efficiency of SOI absorption by surface plasmon resonance. The structural parameters such as SiO2 thickness, period of corrugation, and the duty-ratio were optimized by FDTD simulation.

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Periodical:

Edited by:

Arturs Medvids

Pages:

154-157

DOI:

10.4028/www.scientific.net/AMR.222.154

Citation:

A. Ono et al., "High-Efficiency SOI Photodetector Utilizing Surface Plasmon Resonance in Gold Corrugated Structure", Advanced Materials Research, Vol. 222, pp. 154-157, 2011

Online since:

April 2011

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$35.00

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