Electromagnetic Modeling of Microwave Axial Injection Torch at Atmospheric Pressure Used for Thin Film Deposition
This article describes the three dimensional electromagnetic modeling of a microwave (2.45 GHz) plasma device, based on an axial injection torch (AIT). The model solves Maxwell's equations by the finite integration technique (FIT). We are interested in obtaining the optimal position of the short circuit in order to obtain the best percentage of coupling at 2.45 GHz. and understanding the influence of various geometrical parameters on the physical distribution of the electromagnetic field and on the power transfer within the structure.
El-Hachemi Amara and Djamila Bennaceur-Doumaz
N. Ikhlef et al., "Electromagnetic Modeling of Microwave Axial Injection Torch at Atmospheric Pressure Used for Thin Film Deposition", Advanced Materials Research, Vol. 227, pp. 105-110, 2011