Electromagnetic Modeling of Microwave Axial Injection Torch at Atmospheric Pressure Used for Thin Film Deposition

Nabil Ikhlef; Mohamed Mekidèche; Oliver Leroy; Ammar Tibouche

doi:10.4028/www.scientific.net/AMR.227.105

Paper Titles

In Situ Metal Matrix Composite Surfacing by Laser Surface Alloying
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Comparison of the Capability of Peak Function in Describing Real Condensation Particle Counter Profiles
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One-Dimensional Modeling of a Dielectric Barrier Discharge in NeXe Mixture, Application to Excimer Lamps
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Electromagnetic Modeling of Microwave Axial Injection Torch at Atmospheric Pressure Used for Thin Film Deposition
p.105

Modelling Sequential Impact of Molten Droplets on a Solid Surface in Plasma Spray Process
p.111

Fluid Model Simulation of DC Glow Discharges
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PIC-MC Simulation Method of DC Discharge Plasmas
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Modeling of Detector Radiations Response P-I-N in Technology Thin Film on ASIC (TFA) Intended for Digitalization in Medical Imagery
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 227Electromagnetic Modeling of Microwave Axial...

Electromagnetic Modeling of Microwave Axial Injection Torch at Atmospheric Pressure Used for Thin Film Deposition

Abstract:

This article describes the three dimensional electromagnetic modeling of a microwave (2.45 GHz) plasma device, based on an axial injection torch (AIT). The model solves Maxwell's equations by the finite integration technique (FIT). We are interested in obtaining the optimal position of the short circuit in order to obtain the best percentage of coupling at 2.45 GHz. and understanding the influence of various geometrical parameters on the physical distribution of the electromagnetic field and on the power transfer within the structure.

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Periodical:

Advanced Materials Research (Volume 227)

Pages:

105-110

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.227.105

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Online since:

April 2011

Authors:

Nabil Ikhlef, Mohamed Mekidèche, Oliver Leroy, Ammar Tibouche

Keywords:

3D Numerical Modeling, Atmospheric Pressure, Axial Injection Torch (AIT), Microwave Discharge, Optimization, Waveguide

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