Research Survey on Synthesis Methods of Silicon Nanowires

Abstract:

Silicon nanowires (SiNWs) are new one-dimensional material with unique properties, which have been widely used in field-effect devices, nano-sensors and other nano-electronic devices. In this paper, the new progress in research on the synthesis methods of SiNWs is summarized. The influencing factors and characteristics of each synthesis method are discussed. Finally, a new method is put forward which based on the advantages both on thermal evaporation and template method, and this method can synthesize SiNWs arrays with uniform diameter, high-order, high-purity and with high-yield. This method will be a new research orientation in the future.

• Periodical: Advanced Materials Research (Volumes 233-235)
• Pages: 2098-2104
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.233-235.2098
• Online since: May 2011
• Authors: Hong Mei Zheng, Zhi Shan Yuan, Yu Juan Wang
• Keywords: Progress, Silicon Nanowire, Synthesis Method

References

[1] J.G. Liu, X.H. Fan, J. Chen, et al: Journal of materials science and engineering. Vol. 23-4 (2005), pp.589-592. (In Chinese)

[2] G.W. Zhou, Z. Zhang, D.P. Yu, et al: Science in China (Series A). Vol. 29-1 (1999), pp.85-91. (In Chinese)

[3] Y.H. Tang: Silicon Nanowiers and Nanotubes (Chemical Industry Press, Beijing 2007). (In Chinese)

[4] H. Suzuki, H. Araki, M. Tosa, et al: Chemical Physics Letters. Vol. 486 (2009), pp.211-215

[5] G.B. Yuan, H.Z. Zhao, X.H. Liu, et al: Angew. Chem. Vol. 121 (2009), pp.9860-9864

[6] S. Sharma, T.I. Kamins, R. Stanley Williams: Journal of Crystal Growth. Vol. 267 (2004), p.613–618

[7] S. Volker, S. Stephan, G. Ulrich: Nano letters. Vol. 5-5 (2005), pp.931-935

[8] X.B. Zeng, Y.Y. Xu, S.B. Zhang, et al: Journal of Crystal Growth. Vol. 247 (2003), pp.13-16

[9] Z.Q. Liu, Z.W. Pan, L.F. Sun, et al: Journal of Physics and Chemistry of Solids. Vol. 61 (2000), p.1171–1174

[10] A.I. Hochbaum, R. Fan, R.R. He, et al: Nano letters. Vol.5-3 (2005), pp.457-460

[11] B.S. Kim, T.W. Koo, J.H. Lee, et al: Nano letters. Vol. 9-2 (2009), pp.846-869

[12] J. Westwater, D.P. Gosain, S. Tomiya, et al: J. Vac. Sci. Technol (B). Vol. 15-3 (1997), pp.554-557

[13] A. Jordi, K. Billel, R.I.C. Pere, et al: Nanotechnology. Vol. 18 (2007), pp.1-8

[14] Y.F. Zhang, Y.H. Tang, C. Lam, et al: Journal of Crystal Growth. Vol.212 (2000), pp.115-118

[15] Z. Zhang, X.H. Fan, L. Xu, et al: Chemical Physics Letters. Vol.337 (2001), pp.18-24

[16] J.J. Niu, J. Sha, D.R. Yang: Physica E. Vol. 23 (2004), p.131–134

[17] S.K. Srivastava, P.K. Singh, V.N. Singh, et al: Physica E. Vol.41 (2009), pp.1545-1549

[18] L.M. Yu, L.J. Qi, X.H. Fan, et al: Materials for M echanical Engineering. Vol.29-4 (2005), pp.23-26. (In Chinese)

[19] I. Lombardi, A.I. Hochbaum, P.D. Yang, et al: Chem. Mater. Vol.18 (2006), pp.988-991

[20] K.K. Lew, J.M. Redwing: Journal of Crystal Growth. Vol. 254(2003), pp.14-22

[21] L.J. Fu, M.Y. Li, J. Wang, et al: Microscope, measurement, microfabrication and equipment. Vol. 45-2 (2008), pp.109-113. (In Chinese)

[22] J. Zhang, M.H. Li, A. X Wei, et al: Journal of synthetic crystals. Vol. 34-5 (2005), pp.936-939. (In Chinese)

[23] Z.P. Huang, X.X. Zhang, M. Reiche, et al: Nano Letters. Vol.9-8 (2008), pp.3046-3051

[24] M. Schade, N. Geyer, B. Fuhrmann, et al: Appl Phys A. Vol. 95 (2009), p.325–327

[25] H.S. Seo, X.P. Li, H. D. Um, et al: Materials Letters. Vol. 63 (2009), p.2567–2569

[26] J.J. Niu, J.N. Wang: Materials Letters. Vol. 28 (2008), p.767–771

[27] J.J. Niu, J.N. Wang: Physica E. Vol. 39 (2007), p.244–247

[28] D.P. Yu, Y.J. Xing, Q.L. Hang, et al: Physica E. Vol. 9 (2001), pp.305-309

[29] H.F. Yan, Y.J. Xing, Q.L. Hang, et al: Chemical Physics Letters. Vol. 323 (2000), pp.224-228

[30] J.J. Niu, J. Sha, Z.H. Liu, et al: Physica E. Vol. 24 (2004), p.268–271

[31] E.H. Kim, D.H. Park, S.Y. Park, et al: Thin Solid Films. Vol. 517 (2009), pp.6629-6634

[32] J.Y. Yang, S.G. Lu, S.R. Kan, et al: Chinese journal of inorganic chemistry. Vol. 25-4 (2009), pp.756-760. (In Chinese)

[33] Y.W. Chen, S.H. Jiang, B.X. Shao, et al: Chinese journal of inorganic chemistry. Vol.23-5 (2007), pp.915-918. (In Chinese)

[34] Z.L. Wang, Y. Liu, Z. Zhang: Handbook of Nanophase and Nanostructered Materials-Materials Systems and Applictions () (Tsinghua University Press, Beijing 2002).

[35] Y.W. Wang, V. Schmidt, S. Senz, et al: nature nanotechnology. Vol. 12-1 (2006), pp.186-189

[36] Y. K. Choi, J. Zhu, J. Grunes, et al: J. Phys. Chem. B. Vol. 107 (2003), pp.3340-3343

[37] Information on http://www.patent-cn.com/C01B/CN1569628.shtml

[38] Y.W. Chen, S.H. Jiang, L.B. Liu, et al: Journal of function materials and devices. Vol. 14-6 (2008), pp.961-965. (In Chinese)

[39] S.C. Shiu, S.C. Hung, J.J. Chao, et al: Applied Surface Science. Vol. 255 (2009), pp.8566-8570