In order to study Antibacterial properties of nanometer TiO2 thin films, nanometer M3+-TiO2 films have been prepared on glass by RF magnetron co-sputtering method. The films were characterized by SEM, XRD, and AFM. The influence of Fe, Sb elements and calcination temperature on the films structure was investigated. The bactericidal activity for the bacteria cells was estimated by relative number of bacteria survived calculated from the number of viable cells which from colonies on the nutrient agar plates. The nanometer M3+-TiO2 thin films exhibited a high antibacterial activity, which was enhanced with the increase of the temperature of thermal treatment and formation of anatase crystalline structure.