Hydrogen Sensing Properties of WO3/Pd Composite Films

Jin Hua Li; Meng Zhao; Jiang Bin Su; Mei Ping Jiang

doi:10.4028/www.scientific.net/AMR.287-290.2343

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 287-290Hydrogen Sensing Properties of WO3/Pd Composite...

Hydrogen Sensing Properties of WO3/Pd Composite Films

Abstract:

WO3/Pd layered composite films were prepared by magnetron Sputtering on glass substrate. After deposition, samples were annealed with different condition. The hydrogen sensitive response of the composite film was measured by home-made measurement system. The results indicated that suitable annealing could increase the response sensitivity of the layered composite film to hydrogen detect, Exorbitant annealing temperature will damage Pd layer on the WO3 suface, then decrease the hydrogen detect sinsitivity badly.

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Periodical:

Advanced Materials Research (Volumes 287-290)

Pages:

2343-2346

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.287-290.2343

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Online since:

July 2011

Authors:

Jin Hua Li, Meng Zhao, Jiang Bin Su, Mei Ping Jiang

Keywords:

Hydrogen Sensor, Magnetron Sputtering, WO3/Pd Composite Film

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