Hydrogen Sensing Properties of WO3/Pd Composite Films
WO3/Pd layered composite films were prepared by magnetron Sputtering on glass substrate. After deposition, samples were annealed with different condition. The hydrogen sensitive response of the composite film was measured by home-made measurement system. The results indicated that suitable annealing could increase the response sensitivity of the layered composite film to hydrogen detect, Exorbitant annealing temperature will damage Pd layer on the WO3 suface, then decrease the hydrogen detect sinsitivity badly.
Jinglong Bu, Pengcheng Wang, Liqun Ai, Xiaoming Sang, Yungang Li
J. H. Li et al., "Hydrogen Sensing Properties of WO3/Pd Composite Films", Advanced Materials Research, Vols. 287-290, pp. 2343-2346, 2011