ZnO Films Deposited on Various Diamond Film Substrates with Different Surface Roughness
ZnO thin films were deposited by radio frequency (R. F.) magnetron sputtering on various diamond film substrates with different surface roughness. The influence of surface roughness on structural properties and surface morphology of ZnO thin films was investigated by X-ray diffraction (XRD) and atom force microscopy (AFM), respectively. Only on the nanocrystalline and free-standing diamond substrates, ZnO films with preferential c-axis orientation and smooth surface were obtained.
Jinglong Bu, Pengcheng Wang, Liqun Ai, Xiaoming Sang, Yungang Li
R. Fan et al., "ZnO Films Deposited on Various Diamond Film Substrates with Different Surface Roughness", Advanced Materials Research, Vols. 287-290, pp. 2347-2350, 2011