ZnO Films Deposited on Various Diamond Film Substrates with Different Surface Roughness

Abstract:

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ZnO thin films were deposited by radio frequency (R. F.) magnetron sputtering on various diamond film substrates with different surface roughness. The influence of surface roughness on structural properties and surface morphology of ZnO thin films was investigated by X-ray diffraction (XRD) and atom force microscopy (AFM), respectively. Only on the nanocrystalline and free-standing diamond substrates, ZnO films with preferential c-axis orientation and smooth surface were obtained.

Info:

Periodical:

Advanced Materials Research (Volumes 287-290)

Edited by:

Jinglong Bu, Pengcheng Wang, Liqun Ai, Xiaoming Sang, Yungang Li

Pages:

2347-2350

DOI:

10.4028/www.scientific.net/AMR.287-290.2347

Citation:

R. Fan et al., "ZnO Films Deposited on Various Diamond Film Substrates with Different Surface Roughness", Advanced Materials Research, Vols. 287-290, pp. 2347-2350, 2011

Online since:

July 2011

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Price:

$35.00

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