This paper aims to evaluate residual stress of coated film on cold work tool steel grade SKD11 (JIS) substrate. Four types of film coating were deposited on hardened SKD11 steel. Mechanical property of film coatings was examined by nano-indentation. The thickness of the films was analyzed by scanning electron microscopy (SEM). Residual stress of coated film was investigated by using curvature technique based on the Stoney equation. The results of them were compared and correlated to the bond strength of the films from scratch testing. The influences of residual stress on bond strength of the films were thoroughly discussed in details.