The Synthesis and Characterization of SrTiO₃ Film Fabricated by Micro Arcoxidation

Abstract:

Pure titanium plates as anode and mixture of solutions containing 0.2M Sr(OH)₂ and 0.2M NaOH as electrolyte, titanium plates were microarc-oxidated for 10 minutes. X-Ray Diffraction (XRD) analysis indicated that SrTiO₃ film was successfully deposited. The MAO film is composed mainly of tetragonal SrTiO₃ phases and found to possess high dielectric constant of 371.0 at the frequency of 1 kHz. Scanning Electron Microscopy (SEM) and portable roughness tester were used to characterize the surface morphology and roughness values(Ra), The influences of electrolyte concentration, current density and frequency on the surface morphology of SrTiO₃ film were investigated in detail . several rules were drawn from the results. A kinetics expression was established for the growth of film thickness and agreed well with the experimental results.

• Periodical: Advanced Materials Research (Volumes 311-313)
• Pages: 1262-1266
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.311-313.1262
• Online since: August 2011
• Authors: Hui Yong Guo, Wen Bo Huang, Wen Fang Li, Guo Ge Zhang, En Fu Wang
• Keywords: Characterization, Dielectric Film, Micro-Arc Oxidation (MAO), Strontium Titanate, Synthesis

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