The Synthesis and Characterization of SrTiO3 Film Fabricated by Micro Arcoxidation
Pure titanium plates as anode and mixture of solutions containing 0.2M Sr(OH)2 and 0.2M NaOH as electrolyte, titanium plates were microarc-oxidated for 10 minutes. X-Ray Diffraction (XRD) analysis indicated that SrTiO3 film was successfully deposited. The MAO film is composed mainly of tetragonal SrTiO3 phases and found to possess high dielectric constant of 371.0 at the frequency of 1 kHz. Scanning Electron Microscopy (SEM) and portable roughness tester were used to characterize the surface morphology and roughness values(Ra), The influences of electrolyte concentration, current density and frequency on the surface morphology of SrTiO3 film were investigated in detail . several rules were drawn from the results. A kinetics expression was established for the growth of film thickness and agreed well with the experimental results.
H. Y. Guo et al., "The Synthesis and Characterization of SrTiO3 Film Fabricated by Micro Arcoxidation", Advanced Materials Research, Vols. 311-313, pp. 1262-1266, 2011