High-Aspect-Ratio and Self-Sensing Probe for AMF Based on Micro-Fabrication

Abstract:

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The cantilever with a high-aspect-ratio and long probe is a key sub-system of the atomic force microscopes (AFMs) used to measure the surface aspect of the mechanical and optical devices. In this paper, a novel cantilever with a 50μm-length-probe and self-sensing piezoresistor was designed; and based on the micro fabrication technology, the processes were planned. The dynamic and static characteristics of the cantilever were analyzed on theory and finite element method (FEM). The results show that the length of the probe has no effect on the cantilever’s dynamic and static performance.

Info:

Periodical:

Advanced Materials Research (Volumes 317-319)

Edited by:

Xin Chen

Pages:

1645-1648

DOI:

10.4028/www.scientific.net/AMR.317-319.1645

Citation:

G. F. He and W. Gao, "High-Aspect-Ratio and Self-Sensing Probe for AMF Based on Micro-Fabrication", Advanced Materials Research, Vols. 317-319, pp. 1645-1648, 2011

Online since:

August 2011

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$35.00

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