Low Cost SU8 Based Above IC Process for High-Q RF Power Inductors Integration
This paper presents a new process for integration of high-Q RF power inductors above low resistivity silicon substrates. The process uses the SU8 resin as a dielectric layer. The aim of using the SU8 is to form thick dielectric layer that can enhance the performance of the inductors. The flexibility of the process enables the possibility to realize complex shaped planar inductors with various dielectric and metal thicknesses to meet the requirements of the application. Q values of 55 at 5 GHz has been demonstrated for an inductance value of 0.8 nH using a 60 µm thick SU8 layer and 30 µm thick copper ribbons.
Maher Soueidan, Mohamad Roumié and Pierre Masri
A. Ghannam et al., "Low Cost SU8 Based Above IC Process for High-Q RF Power Inductors Integration", Advanced Materials Research, Vol. 324, pp. 431-433, 2011