Evaluation of Surface Roughness of Quartz Glass Substrate in Fabrication Process for Neutron Focusing Mirror

Mikinori Nagano; Fumiya Yamaga; Kenta Yamasaki; Nobuyuki Zettsu; Dai Yamazaki; Ryuji Maruyama; Kazuhiko Soyama; Kazuya Yamamura

doi:10.4028/www.scientific.net/AMR.325.647

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 325Evaluation of Surface Roughness of Quartz Glass...

Evaluation of Surface Roughness of Quartz Glass Substrate in Fabrication Process for Neutron Focusing Mirror

Abstract:

The aspherical supermirror is among the most useful optics for focusing a neutron beam with a wide wavelength range. The improvement in surface roughness is essential for increasing the focusing gain. A highly efficient and high-precision fabrication process for the substrate of the aspherical mirror combining conventional precision grinding, numerically controlled local wet etching (NC-LWE) figuring, and low-pressure polishing was developed. Using this new fabrication process, plano-elliptical neutron-focusing mirror substrates were successfully fabricated with a figure error of submicrometer order and an rms surface roughness of less than 0.3 nm. In this report, the surface roughness of a quartz glass substrate for a neutron focusing supermirror was evaluated.

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Periodical:

Advanced Materials Research (Volume 325)

Pages:

647-652

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.325.647

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Online since:

August 2011

Authors:

Mikinori Nagano, Fumiya Yamaga, Kenta Yamasaki, Nobuyuki Zettsu, Dai Yamazaki, Ryuji Maruyama, Kazuhiko Soyama, Kazuya Yamamura

Keywords:

Aspherical, CeO₂, Etching, Focusing, HF, Low Pressure Polishing, Neutron, Numerically Control, Quartz Glass , Roughness, Supermirror

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