This study discussed what rotary ultrasonic machining (RUM) and tool geometry parameters combination can obtain bigger material removal rate (MRR) in drilling. The experimental configuration of this study was planned using Taguchi orthogonal array, where the drill diameter, rotation speed, power and feed rate were taken as the experimental factors. A relation model among the MRR and standard deviation of the holes walls and processing parameters and tool geometry was established, so as to achieve maximum MRR of the overall deep holes walls. The experimental results proved that application of the optimized parameters combination in rotary ultrasonic machining of holes processing can obtain bigger and better removal rate of holes walls. The effect of control factors on the holes quality was discussed from the straightness deviation and maximum material removal rate of related factors on the holes when the Taguchi method was used in rotary ultrasonic machining of holes drilling. The results showed that rotation speed, power, and feed rate under bigger level have a larger MRR than that of other level in a fixed drill diameter.