Characterization of Microwave Plasma for Polymer Surface Modification Using FTIR Emission Spectroscopy

Maryam Mavadat; Stéphane Turgeon; André Ricard; Gaetan Laroche

doi:10.4028/www.scientific.net/AMR.409.797

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 409Characterization of Microwave Plasma for Polymer...

Characterization of Microwave Plasma for Polymer Surface Modification Using FTIR Emission Spectroscopy

Abstract:

Infrared (IR) emission spectroscopy measurements were performed in N₂ microwave discharges at pressures ranging from 0.5 to 3 Torr and powers of 200 and 300 W. Although emission spectroscopy in the infrared region has rarely been investigated, this technique has nevertheless provided numerous key data. For instance, numerical generation of spectra to match experimental FTIR emission data allowed estimating the plasma temperature.

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Periodical:

Advanced Materials Research (Volume 409)

Pages:

797-801

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.409.797

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Online since:

November 2011

Authors:

Maryam Mavadat, Stéphane Turgeon, André Ricard, Gaetan Laroche

Keywords:

Infrared Spectroscopy, Plasma Emission Spectroscopy, Plasma Temperature, Polymer Surface Treatment

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References

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