Mechanism and Effect of Charges Accumulation on Differential Capacitance Detector Diodes in MEMS Accelerometer

Abstract:

Detector diodes have been successfully used in differential capacitive MEMS accelerometer for capacitance-to-voltage conversion. During capacitances’ charging and discharging, charge accumulation makes test results disagree with the calculated values based on its differential equations simply and finally has a great influence on circuit’s optimization. A model of charges accumulation process is built to describe the real conversion relationship between the value of capacitance variations and the output voltage. Experiments show that the model not only meets the test result well but also provides a foundation for circuit’s optimization.

• Periodical: Advanced Materials Research (Volume 411)
• Pages: 432-436
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.411.432
• Online since: November 2011
• Authors: Peng Xiao, Xiao Bin Wang, Zhao Bing Yan, Jie Yang
• Keywords: Charges Accumulation, Detector Diodes, Differential Capacitive MEMS Accelerometer

References

[1] Azrif Manut, Badariah Bais and Burhanuddin Yeop Majlis, "Mechanical Behaviour of a l0g MEMS Non-Crossing Differential Capacitive Accelerometer", ICSE2004 Proc. 2004, Kuala Lumpur, Malaysia.

DOI: 10.1109/smelec.2004.1620904

[2] Song Xing, Fang Jiancheng and Sheng Wei, Circuit for close-loop capacitive micro-accelerometers, Journal of Beijing University of Aeronautics and Astronautics, 2009, Vol 35, No.3 384-388.

[3] Navid Yazdi, Haluk Kulah and Khalil Najafi, "Precision Readout Circuits for Capacitive Microaccelerometers", 0-7803-8692-2/04/$20.00 ©2004 IEEE.

DOI: 10.1109/icsens.2004.1426091

[4] Hu Hao, Dong Jingxin and Wan Caixin, Error analysis of capacitance detector diodes in micro-machined accelerometers, Tsinghua Univ(Sci&Tech), 2008, Vol 48, No.11 1908 – 1910.