An Experimental Research of Gaseous Flow in Rough Microchannels

Abstract:

With the development of MEMS technology and its increasing applications in many engineering fields, the experimental research on micro-scale fluidic theory has become a spotlight topic in the past decade. In this paper, numerical and experimental investigations on the effects of roughness, compressibility and gas rarefaction on the nitrogen flow in rough microchannels had been investigated. Microchannels based on silicon substrates were fabricated by the MEMS process. Roughness surfaces of the microchannels had been obtained by KOH and TMAH solutions with different solubility etching on (100) silicon wafer. The quality of the microchannels was performed with a SEM and the measurements and the overall size of the microchannels were carried out with a step profiler. The Pyrex® 7740 and silicon wafers were packaged using the anodic bonding method. The testing platform was designed and fabricated, and checked for the gas sealing. Finally, the experimental device was constructed, and the results of gas flow in rough microchannels were measured.

• Periodical: Advanced Materials Research (Volume 411)
• Pages: 442-446
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.411.442
• Online since: November 2011
• Authors: Taian Ren, Lan Chang, Jing Yun Zhao, Ge Qin
• Keywords: Gas Flow, Micro-Channel, Micro-Electromechanical System (MEMS), Roughness

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