Research on Dynamic Coupling Characteristics of Electrostatic Actuated Micro Beam Considering Gas Film Damping

Abstract:

It has been proved by large number of experiments that gas film damping has great influence on MEMS structures. Based on the elastic and material mechanics, this paper built a linear-vibration model for the electrostatic actuated micro-beam. According to the rarefied gas dynamics theory, a kind of modified Reynolds equation is adopted in the system modeling. In view of the study on small deflection of micro-beam has been investigated already by many researchers, this paper focus the research on large beam deflections, i.e. the mid-point deflection can be compared with the thickness of the gas film. The dynamic characteristics of micro-beam are investigated through coupling the dynamic vibration equation with the modified Reynolds equation. Through the finite difference method, the discrete form of the coupled dynamic equations has been obtained.

• Periodical: Advanced Materials Research (Volume 411)
• Pages: 437-441
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.411.437
• Online since: November 2011
• Authors: Wei Dong Wang, Xiang Ji, Xiang Yu Niu
• Keywords: Dynamic Coupling Characteristics, Finite Difference Method (FDM), Micro Beam, Reynolds Equation, Squeeze Film Damping

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