Design and Synthesis of DLC Films with Different sp3/sp2 Ratios by Middle Frequency Magnetron Sputtering

J. L. Jiang; D. Chen; H. Yang

doi:10.4028/www.scientific.net/AMR.415-417.1969

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 415-417Design and Synthesis of DLC Films with Different...

Design and Synthesis of DLC Films with Different sp³/sp² Ratios by Middle Frequency Magnetron Sputtering

Abstract:

Diamond-like carbon (DLC) films with different sp³/sp² ratios were deposited using middle frequency magnetron sputtering. The sp³/sp² ratio of the films can be tailored by codoping of Ti and Si elements under different CH₄ flow rate. The films were characterized by X-ray photoelectron spectroscopy (XPS), Raman spectroscopy and Fourier transform infrared (FTIR) spectroscopy. The results show that the sp³/sp² ratio ranges from 0.18 to 0.63 with increasing of CH₄ flow rate. Hydrogen atoms in the films are mainly bonded to sp³ carbon atoms. The film deposited at 60 sccm CH₄ flow rate exhibits the highest bonded hydrogen content.

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Advanced Materials Research (Volumes 415-417)

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1969-1972

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https://doi.org/10.4028/www.scientific.net/AMR.415-417.1969

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December 2011

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J. L. Jiang, D. Chen, H. Yang

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Binary Codoping, Dlc Films, Sp³/Sp² Ratio, Systematic Effects

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