Design of a SEM Compatible Slip-Stick Nano-Positioner with High Bearing Capacity

Wei Bin Rong; Miao Yu; Shi Zhong Zhang; Le Feng Wang; Li Ning Sun

doi:10.4028/www.scientific.net/AMR.433-440.3052

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 433-440Design of a SEM Compatible Slip-Stick...

Design of a SEM Compatible Slip-Stick Nano-Positioner with High Bearing Capacity

Abstract:

This paper presents a new structure of slip-stick positioner with a high bearing capacity, which is designed according to the requirement of nano-manipulation in the Scanning Electron Microscope (SEM). In addition, to analyze the performance of the slip-stick positioner, a dynamic model is developed in MATLAB/Simulink. The experimental results demonstrate the excellent performance of this positioner and especially its bearing capacity can be up to 400g.

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Periodical:

Advanced Materials Research (Volumes 433-440)

Pages:

3052-3059

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.433-440.3052

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Online since:

January 2012

Authors:

Wei Bin Rong, Miao Yu, Shi Zhong Zhang, Le Feng Wang, Li Ning Sun

Keywords:

Dynamic Model, Nano-Manipulation, SEM, Slip-Stick

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