The Technique for Fabricating Submicron Moiré Grating Using FIB Milling

Hui Min Xie; Yan Jie Li; Hua Du; Bing Pan; Qiang Luo; Chang Zhi Gu; Hai Chang Jiang

doi:10.4028/www.scientific.net/AMR.47-50.710

Paper Titles

Tensile Deformation Behaviours of Nylon 6 Based Nanocomposites
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X-Ray Micro-Tomography as a Tool for Quantitative Characterization of Advanced Materials Manufacturing Processes
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Wear Behaviors of Nano Grained Aluminum Alloys
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Magnetic and Relaxation Properties of (CO₄₅Fe₄₅Zr₁₀)x(Al2O3)_1-x Thin Films
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The Technique for Fabricating Submicron Moiré Grating Using FIB Milling
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Investigate of Electrical Conductivity of Shape-Memory Polymer Filled with Carbon Black
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Complex Multifunctional Materials for Special Applications
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The Preparation and Study on UHMWPE/Epoxy Gel-Spun Fibres
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Development of a High Performance Peristaltic Micropump
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 47-50The Technique for Fabricating Submicron Moiré...

The Technique for Fabricating Submicron Moiré Grating Using FIB Milling

Abstract:

In this study, focused gallium ion (Ga+) beam is utilised to fabricate micro/submicron spacing gratings on specimen surface. The grating types include: parallel, cross, and hybrid (grating with double-frequency). Several hybrid gratings with double frequency were produced in combination mode or superposition mode, which have a good potential to measure deformation within different range. Techniques for producing different type of gratings are discussed in detail. As an application, a 5000 lines/mm grating was fabricated on an amorphous SIC MEMS cantilever and was successfully used to measure its virtual strain with aid of digital moiré. The experimental results verify the feasibility of fabricating high frequency grating on metal or non-metal surface using the FIB milling and the resultant grating can be used to measure micro-deformation.