Equal Energy Driving Principle in Fabricating Poly-Si Thin Film

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Abstract:

In this article, we have explained quantum state observed in fabricating poly-silicon the thin film and calculated the crystallization procession of rapid thermal annealing as a function of light energy. Equal energy driving principle was presented, it is shown that the change in magnetic frequency leads to the conversion of magnetic field energy to annealing energy.

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Periodical:

Advanced Materials Research (Volumes 512-515)

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55-58

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May 2012

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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