The Influence of Total and Oxygen Partial Pressures on Structure and Hydrophilic Property of TiO2 Thin Films Deposited by Reactive DC Magnetron Sputtering

Surasing Chaiyakun; A. Buranawong; T. Deelert; N. Witit-Anun

doi:10.4028/www.scientific.net/AMR.55-57.465

Paper Titles

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Self-Cleaning Properties of TiO₂ Films Deposited by Reactive Magnetron Sputtering Using Smooth D.C. and Pulsed D.C. Source
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Fabrication of Double Layers of Aramid Fiber/Alumina/Epoxy Resin Laminate Composite Using Low-Pressure Technique
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Fabrication of Ferroelectric Bismuth Titanate Glass-Ceramic by Incorporation Method
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The Influence of Total and Oxygen Partial Pressures on Structure and Hydrophilic Property of TiO₂Thin Films Deposited by Reactive DC Magnetron Sputtering
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Characterization of Anatase and Rutile TiO₂Thin Films Deposited by Two Cathodes Sputtering System
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Ferroelectric Glass-Ceramics from the PbO-Bi₂O₃-GeO₂ System
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Composites Base on Geopolymer Matrices: Preliminary Fabrication, Mechanical Properties and Future Applications
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High Capacity Packet Switching with a Soliton Pulse in a Nonlinear Micro Ring Resonator
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 55-57The Influence of Total and Oxygen Partial...

The Influence of Total and Oxygen Partial Pressures on Structure and Hydrophilic Property of TiO₂Thin Films Deposited by Reactive DC Magnetron Sputtering

Abstract:

TiO2 thin films have been deposited by reactive DC magnetron sputtering technique to study the effect of total pressure and oxygen partial pressure on structure and hydrophilic properties. The crystal structure and hydrophilic property was measured by XRD and contact angle meter, respectively. The results showed that the films were composed of pure rutile and mixed of anatase/rutile structure dependent on the total pressure and oxygen partial pressure. It was found that all films can perform hydrophilic property. In case of high total pressure, the films showed superhydrophilic property, whereas the films deposited under various oxygen partial pressures with fixed total pressure were all films exhibit superhydrophilic property.