Effect of Machining of Small Tools by Means of Focused Ion Beam

Kohichi Miura; Syou Satoh; Takazo Yamada; Hwa Soo Lee

doi:10.4028/www.scientific.net/AMR.565.588

Paper Titles

Mechanical Properties and Deformation of LiTaO₃ Single Crystals Characterised by Nanoindentation and Nanoscratch
p.564

Determination of the Minimum Depth of Cut in Nanometric Machining Using Molecular Dynamics Simulation
p.570

A Non-Dimensional Analysis of Tool Edge Radius Effect on the Mechanics of Micromachining
p.576

Influence of Centrifugal Force on Characteristics of Turbine Shaft for Micro-Spindle for Micro-Cutting
p.582

Effect of Machining of Small Tools by Means of Focused Ion Beam
p.588

Application of Cavitation Aided Abrasive Machining to Manufacture of Micro Air Vents on Injection Molds
p.597

Static Properties Research of Grinding Dynamometer for Wafer Grinder
p.603

Development of Ultra-Precision Grinder for 300mm Wafers
p.609

Deposition and Tribological Properties of CVD Diamond/Diamond-Like Carbon Composite Films
p.615

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 565Effect of Machining of Small Tools by Means of...

Effect of Machining of Small Tools by Means of Focused Ion Beam

Abstract:

Micro holes which diameters are more than 0.1 mm are mechanically machined.　However since the ideal sharp cutting edges are difficult to be made in micro drills, fine geometrical shape of micro holes is difficult to be obtained. In this study, the influence of the geometrical shape of cutting edge is experimentally discussed. In order to carry out experimental evaluation, focused ion beam is used to make the geometrical shapes of micro drills.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Advanced Materials Research (Volume 565)

Pages:

588-593

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.565.588

Citation:

Cite this paper

Online since:

September 2012

Authors:

Kohichi Miura, Syou Satoh, Takazo Yamada, Hwa Soo Lee

Keywords:

Additional Machining, Focused Ion Beam (FIB), Micro Machining, Micro-Drill

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] T. Obikawa and B. Kani: End Milling of Titanium Alloy with a Textured Ball End Mill, Proceedings of The 6th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Saitama, Japan, Nov. (2011), No. 3352.

DOI: 10.1299/jsmelem.2011.6._3352-1_

Google Scholar

[2] T. Adachi and T. Kaito: Focused ion beam machining of diamond-1st report Fundamental machining characteristics and attempt at processing a diamond turning tool-, Journal of the Japan Society for Abrasive Technology, Vol. 53, No. 6, (2009).

Google Scholar

[3] P. Russell, T. Stark, D. Griffis, J. Phillips and F. Jarausch: Chemically and Geometrically enhanced focused ion beam micromachining, J. Vac. Sci Technol. (1998) 2494.

DOI: 10.1116/1.590197

Google Scholar

[4] T. Suzuki, H. Saito, M. Kato, K. Abe: Shaping of monocrystalline diamond end mill tool with one cutting edge by focused ion beam, Report of yamagata research institute of technology, No. 36, (2007), pp.5-10.

Google Scholar

[5] M. Oguri, H. Niwa, Hiroyoshi: Study on thinning of drill. Bulletin of Aichi University of Education (1983), pp.98-99.

Google Scholar