Precision Calculation for Stiffness of the Complex Microstructure

Yu Liu; Zhi Yu Wen; Hong Yun Yang

doi:10.4028/www.scientific.net/AMR.60-61.135

Paper Titles

Poly(4-vinylpyridine) Coated CdTe Core/Shell Quantum Dots
p.114

Analysis of Coupled Electro-Thermal-Mechanical of Micro Gas Pressure Sensor Based on Micro-Hotplate Technology
p.119

Preparation of Arsenic Trioxide-Loaded PLGA Nanoparticles and Investigation of its Inhibitory Effects on Proliferation of Rabbit Vascular Smooth Muscle Cells In Vitro
p.125

Experimental Studies of the Surface Forces on Micro Gap Plates with Different Bumps
p.130

Precision Calculation for Stiffness of the Complex Microstructure
p.135

Synthesis and Characterization of CdTe/PAA/P-4-VP Quantum Dots
p.141

Test on Sound Transmission Characteristic of PTFE Micro-Aperture Membrane
p.146

Study of Nanosecond Pulse Laser Micro-Fabrication
p.151

Preparation Process of Metal Matrix Micro/Nano-Powders Reinforced by Nanometer Particles
p.155

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 60-61Precision Calculation for Stiffness of the Complex...

Precision Calculation for Stiffness of the Complex Microstructure

Abstract:

The stiffness of microstructure is an important parameter of the microsensor. It is usually obtained by FEM approach, which is difficult to give an analytical expression. This paper reports on a 2-D microaccelerometer with the complex microstructure. Its main axial stiffness is carried out by using force method as well as principle of work and strain energy. During the deduction, deformation of all beams is taken into account, so the theoretical results are in accordance with that of FEM approach very well and the error is less than one in thousand. Furthermore, we neither introduce the other assumptions nor design the special dimension. So this methodology is strict in theory, and can be extended to analysis for the displacement and stiffness of the symmetric and statically indeterminate microstructure.