Study of Nanosecond Pulse Laser Micro-Fabrication

Chun Yang Liu; Xing Fu; Yong Wu; Feng Ming Sun; Xiao Tang Hu

doi:10.4028/www.scientific.net/AMR.60-61.151

Paper Titles

Experimental Studies of the Surface Forces on Micro Gap Plates with Different Bumps
p.130

Precision Calculation for Stiffness of the Complex Microstructure
p.135

Synthesis and Characterization of CdTe/PAA/P-4-VP Quantum Dots
p.141

Test on Sound Transmission Characteristic of PTFE Micro-Aperture Membrane
p.146

Study of Nanosecond Pulse Laser Micro-Fabrication
p.151

Preparation Process of Metal Matrix Micro/Nano-Powders Reinforced by Nanometer Particles
p.155

The Research on Sacrificial Layer in the Fabrication of Micro Electromagnetic Relay
p.160

Synthesis and Characterization of the Core-Shell CdTe/ZnS Quantum Dots
p.165

DNA Biosensors Based on Self-Assembled Multi-Walled Carbon Nanotubes
p.170

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 60-61Study of Nanosecond Pulse Laser Micro-Fabrication

Study of Nanosecond Pulse Laser Micro-Fabrication

Abstract:

We study some microstructures fabricated by designed 355nm ultraviolet nanosecond pulse laser micromachining system, which consists of LASER, mechanical and optical structure, 3D work platform, and control system. Nanosecond pulse LASER, with 40ns pulse duration, is chosen as the light source. Mechanical and optical structure is designed for laser beam focusing. Computer software resolves the graphics. And control system based on DSP and FPGA is designed to drive the 3D work platform. Raster sensor is used to measure the real distance that the platform moves. Using this system, some experiments are analyzed and some parameters are optimized. Some microstructures are also fabricated on single crystal silicon wafer and organic glass. The lines of fabricated graphics are 20-40um wide and smooth, with less effect of heat.