The Research on Sacrificial Layer in the Fabrication of Micro Electromagnetic Relay

Ben Dong Liu; De Sheng Li; Jia Hui Yang

doi:10.4028/www.scientific.net/AMR.60-61.160

Paper Titles

Synthesis and Characterization of CdTe/PAA/P-4-VP Quantum Dots
p.141

Test on Sound Transmission Characteristic of PTFE Micro-Aperture Membrane
p.146

Study of Nanosecond Pulse Laser Micro-Fabrication
p.151

Preparation Process of Metal Matrix Micro/Nano-Powders Reinforced by Nanometer Particles
p.155

The Research on Sacrificial Layer in the Fabrication of Micro Electromagnetic Relay
p.160

Synthesis and Characterization of the Core-Shell CdTe/ZnS Quantum Dots
p.165

DNA Biosensors Based on Self-Assembled Multi-Walled Carbon Nanotubes
p.170

Fabrication and Testing of Hard X-Ray Hourglass Lenses
p.175

Study of Control System for a Micro Programmable Blazed Grating
p.180

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The Research on Sacrificial Layer in the Fabrication of Micro Electromagnetic Relay

Abstract:

The armature fabricated with the sacrificial layer techniques is an important part of micro electromagnetic relay. So the sacrificial layer is one of the key fabrication processes in the realization of prototype of micro electromagnetic relay. In this paper several sacrificial layers including Copper, Polyimide and Positive photoresist are studied based on the investigation of the research on sacrificial layer and binding the characteristic of micro electromagnetic relay’s fabrication process.