The Research on Sacrificial Layer in the Fabrication of Micro Electromagnetic Relay
The armature fabricated with the sacrificial layer techniques is an important part of micro electromagnetic relay. So the sacrificial layer is one of the key fabrication processes in the realization of prototype of micro electromagnetic relay. In this paper several sacrificial layers including Copper, Polyimide and Positive photoresist are studied based on the investigation of the research on sacrificial layer and binding the characteristic of micro electromagnetic relay’s fabrication process.
B. D. Liu et al., "The Research on Sacrificial Layer in the Fabrication of Micro Electromagnetic Relay", Advanced Materials Research, Vols. 60-61, pp. 160-164, 2009