Analyzing the Response of Spring-Mass-Capacitor Structure Using Energy Method

Wu Zhou; Xiao Ping He; Wei Su; Bai Lin Li

doi:10.4028/www.scientific.net/AMR.60-61.420

Paper Titles

A Study on the Assembly and Improvement of Electrical Contact between Carbon Nanotube and Microelectrode
p.399

Preparation of Self-Assembly Monolayer by Scratching Si(100) Surface in the Presence of Aryl Diazonium Salts
p.406

Static Torsion of a Magnetostrictive Bimorph with In-Plane Anisotropy
p.410

Carbon Nanofibers Synthesized by Ethanol Catalytic Chemical Vapor Deposition
p.416

Analyzing the Response of Spring-Mass-Capacitor Structure Using Energy Method
p.420

Flexible Microelectrode Array on Parylene for Subretinal Stimulation and its Biocompatibility Test
p.425

Molecular Dynamics Simulation on the Out-of Plane Thermal Conductivity of Single-Crystal Carbon Thin Films
p.430

Molecular Dynamics Modeling and Effects of Cutting Parameters on Nanometric Cutting Process
p.435

Deposition Characteristics of Direct-Write Suspended Micro/Nano-Structures
p.439

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Analyzing the Response of Spring-Mass-Capacitor Structure Using Energy Method

Abstract:

The spring-mass-capacitor structure in micro-electro-mechanical systems (MEMS) is a typical macromodel, its response and stability under step voltage is presented in this paper. Energy method is used to analyze the dynamic behavior of mass block where its velocity is zero and accelerometer is zero, respectively. The condition of stability under step voltage is the initial stiffness ratio must less than 0.25, and finally the relation of energy loss and oscillating behavior of block is analyzed. The conclusion is useful to analyze the response of structure and helpful to design a MEMS system composing of spring-mass-capacitor structure.