Analysis of Tunneling Piezoresistive Effect of P-Type Polysilicon Nanofilms

Xue Bin Lu; Xiao Wei Liu; Rong Yan Chuai; Chang Zhi Shi; Ming Xue Huo; Wei Ping Chen

doi:10.4028/www.scientific.net/AMR.60-61.89

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Analysis of Tunneling Piezoresistive Effect of P-Type Polysilicon Nanofilms

Abstract:

The polysilicon nanofilms have significant piezoresistive characteristics. In this paper, an analysis of tunneling piezoresistive effect of p-type polysilicon nanofilms is presented based on the experimental data. The analysis results show that the tunneling piezoresistive effect is much remarkable than piezoresistive effect of neutral region, and the former is about 1.3 to 1.5 times of the latter. The higher is doping concentration, the more remarkable tunneling piezoresistive effect is. This advantage can be utilized to improve the temperature characteristics of polysilicon piezoresistive sensor.