Kinetic Monte Carlo Simulation for the Evolution of Complex Surface in Fabrication of MEMS Devices

Yan Xing; Xiao Li Qiu

doi:10.4028/www.scientific.net/AMR.60-61.99

Paper Titles

Study on Excitation Voltage Effects of the Thermal Excitation Resonant Pressure Sensor
p.79

Gauge Factor and Nonlinearity of P-Type Polysilicon Nanofilms
p.84

Analysis of Tunneling Piezoresistive Effect of P-Type Polysilicon Nanofilms
p.89

Effects of Packaging on RF MEMS Switch’s Return Loss
p.94

Kinetic Monte Carlo Simulation for the Evolution of Complex Surface in Fabrication of MEMS Devices
p.99

Effect of Ag Doping on Structural, Optical and Electrical Properties of SnS:Ag Thin Films Prepared by Pulse Electroposition
p.105

Characteristics of ZnMgO Thin Films Prepared by the Sol-Gel Method
p.110

Poly(4-vinylpyridine) Coated CdTe Core/Shell Quantum Dots
p.114

Analysis of Coupled Electro-Thermal-Mechanical of Micro Gas Pressure Sensor Based on Micro-Hotplate Technology
p.119

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Kinetic Monte Carlo Simulation for the Evolution of Complex Surface in Fabrication of MEMS Devices

Abstract:

This paper introduces a octree search Kinetic Monte Carlo(OS-KMC) that combines the topological requirements for representing an evolving multivalued surface using minimal memory and an efficient search algorithm for the realization of the KMC time evolution. In addition, the data structure for OS-KMC also provides a nature way to generate hexahedral element meshes for the integration between simulator and performance analysis tool. The density of mesh grid and the refinement of the hexahedral element can be controlled in this octree based mesh generation method. In simulating surface morphology during wet etching and micro structure formed by composite MEMS processes, the octree search KMC shows good simulation results with better calculation performance. The octree structure enables the Monte Carlo solutions for large scale problems with complex dynamic surfaces.