Development of Controlled Micro-Mirrors with Large Rotation Angle

Abstract:

Development of micro-mechanical sensors and systems based on them is one of the development branches in microelectronic technology and labeled as one of the technologies of the 21-st century. The relevance and significance of the paper related to the methodology creation for the development and manufacture of micro-mirror with large rotation angle. Methodology was based on an integrated approach to solving such problems as the processes of surface preparation, etching of the complex profile surfaces, matching the silicon structures, etc. which allows to create MOEMS elements.

• Periodical: Advanced Materials Research (Volume 630)
• Pages: 339-343
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.630.339
• Online since: December 2012
• Authors: Sergei Timoshenkov, S. Evstafyev, I. Britkov
• Keywords: Actuator, Angle, Electro-Thermal Principle, Micro-Mirror, MOEMS, Rotation

References

[1] S.P. Timoshenkov, A.N. Boyko, B.M. Simonov " Parameter estimation technique for sensitive elements of microaccelerometers and micromirrors, Semiconductors, Vol. 42, No13 (2008), p.1564.

DOI: 10.1134/s1063782608130241

[2] J. Tsai, M. C. Wu, J. Microelectromech. Syst., Vol. 14, No. 6 (2005), p.1323.

[3] L. Wu, H. Xie, A scanning micro-mirror with stationary rotation axis and dual reflective surfaces for 360° forward-viewing endoscopic imaging, in Tech. Dig. 15th Int. Conf. Solid-state Sensors, Actuators and Microsystems, Transducers 2009, Denver, CO, Jun. 2009, pp.2222-2225.

DOI: 10.1109/sensor.2009.5285589

[4] A. Yalcinkaya, H. Urey, D. Brown, T. Montague, R. Sprague Two-axis electromagnetic micro-scanner for high resolution displays, J. Microelectromech. Syst., Vol. 15, No. 4 (2006), p.786.

DOI: 10.1109/jmems.2006.879380

[5] Z. Wan, A. Feinerman, H. Zeng, G. Friedman, Electrocapillary piston motion and a prototype phasemanipulating micromirror, J. Microelectromech. Syst., Vol. 13, No. 4 (2004), p.620.

DOI: 10.1109/jmems.2004.832186

[6] A. Werber, H. Zappe, Tunable pneumatic microoptics, J. Microelectromech. Syst., Vol. 17, No. 5 (2008), p.1218.

DOI: 10.1109/jmems.2008.928712

[7] M. Tani, M. Akamatsu, Y. Yasuda, H. Toshiyoshi, A two-axis piezoelectric tilting micro-mirror with a newly developed PZT-meandering actuator, in Tech. Dig. 20th Int. Conf. MEMS, Kobe, Japan, Jan. 2007, pp.699-702.

DOI: 10.1109/memsys.2007.4432994

[8] Analysis of bi-metal thermostats. Journal of the Optical Society of America and Review of Scientific Instruments, Vol. 11, No 3 (1995), p.233.

[9] G. Lammel, S. Schweizer, P. Renaud, Optical Microscanners and Microspectrometers Using Thermal Bimorph Actuators, Dordrecht, Netherlands, Kluwer Academic Publishers (2002).

DOI: 10.1007/978-1-4757-6083-5

[10] W. Riethmüller, W. Benecke, Thermally excited silicon microactuators, IEEE Trans. Elec. Dev., Vol. 35, No. 6 (1988), p.758.

[11] S. Senturia, Microsystem Design, Kluwer Academic Publishers (2001).