Angular Rate Sensors with Conformal Flexible Multilayer Polymer Wiring Boards

Abstract:

The usage possibility of conformal flexible boards for angular velocity sensors has been described. Production of such sensors allows us to solve the problem of constructing roll sensor for rapidly rotating body (20 Hz) along the longitudinal axis of which are speed reaching 200g, and also perpendicular speed up 20g. The paper also analyzed the possibility of using polyparaxylylene as dielectric and protective layer in conformal multilayer wiring boards (CMWB). Research tests for compliance with the requirements of the developed process conducted and research testing to the requirements of the developed technological process. The proposed approach has been developed and its efficiency has been demonstrated by various experimental scenarios.

• Periodical: Advanced Materials Research (Volume 630)
• Pages: 344-347
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.630.344
• Online since: December 2012
• Authors: Sergey Timoshenkov, Andrey Titov, Yuriy Dolgovykh, Kirill Tikhonov, San Min Naing, Natalya Korobova
• Keywords: Angular Rate Sensor, Conformal, Flexible Board, MEMS

References

[1] D. Sparks et al. Angular rate sensor and accelerometer combined on the same micro-machined CMOS chip, Microsystem tech., Vol. 14 (2008), p.139.

DOI: 10.1007/s005420050117

[2] S.P. Timoshenkov, A.N. Boyko, B.M. Simonov "Parameter estimation technique for sensitive elements of micro-accelerometers and micro-mirrors, Semiconductors, Vol. 42, No13 (2008), p.1564.

DOI: 10.1134/s1063782608130241

[3] S.P. Timoshenko, V.V. Kalugin, S.A. Anchutin, Y.S. Morozov, in: Micro-electromechanical Systems. Moscow, MIET (2009), pp.3-22.