A Comparative Study of TiO₂ Nanocoated Mild Steel Surface Properties between Short and Long Sputtering Time of RF Magnetron

Abstract:

TiO2 nanocoated mild steel surface has been successfully prepared via 100 watt of RF magnetron sputtering by using TiO2 target and sputtering condition was performed in 80sccm argon gas. The studied was done in comparing the surface properties of TiO2 nanocoated mild steel between short term and long term sputtering time at 5 and 60 minutes, respectively. From the results, we have found that the long-term sputtering time producing good surface coating with lower surface roughness at 0.033 nm with thickness in nanometer scale is 169 nm via AFM. Through Auger study revealed that the coating attributed Ti and O elements at energy of 383.48 eV and 483.44 eV, respectively. It was also showed that the intensity of that element high at about 100k a.u. in long-term compared to 55k a.u. short-term of sputtering time. It is thus showed that producing coating depends upon manipulation of parameter in RF magnetron sputtering.

• Periodical: Advanced Materials Research (Volume 667)
• Pages: 562-568
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.667.562
• Online since: March 2013
• Authors: M.F. Achoi, Mohd Nor Asiah, Mohamad Rusop, Saifollah Abdullah
• Keywords: AFM, Auger, Mild Steel, RF Magnetron Sputtering, TiO₂

References

[1] X. -S. Fang, C.H. Ye, L. -D. Zhang, and T. Xie, Twinning-Mediated Growth of Al2O3 Nanobelts and Their Enhanced Dielectric Responses, Adv. Mater. 17 (2005) 1661-1665.

DOI: 10.1002/adma.200401921

[2] J.Q. Quan, Y. Wang, W.P. Chen, H.Y. Tian, L.T. Li, and L.W.C. Helen, Room temperature synthesis of titania microspheres by hydrolysis of titanium alkoxide using water vapor, J. Alloys and Comp. 413 (2006) 307-311.

DOI: 10.1016/j.jallcom.2005.06.067

[3] T. Kasuga, M. Hiramatsu, A. Hoson, T. Sekino, and K. Niihara, Titania Nanotubes Prepared by Chemical Processing, Adv. Mater. 11(1999) 1307-1311.

DOI: 10.1002/(sici)1521-4095(199910)11:15<1307::aid-adma1307>3.0.co;2-h

[4] V.F. Stone, Jr. and R.J. Davis, Synthesis, Characterization, and Photocatalytic Activity of Titania and Niobia Mesoporous Molecular Sieves, Chem. Mater. 10 (1998) 1468-1474.

DOI: 10.1021/cm980050r

[5] Z. Miao, D. Xu, J. Ouyang, G. Guo, X. Zhao, and Y. Tang, Electrochemically Induced Sol−Gel Preparation of Single-Crystalline TiO2 Nanowires, Nano Lett. 2 (2002) 717-720.

DOI: 10.1021/nl025541w

[6] J.H. Rouse and G.S. Ferguson, Stepwise Formation of Ultrathin Films of a Titanium (Hydr)Oxide by Polyelectrolyte-Assisted Adsorption, Adv. Mater. 14 (2002) 151-154.

DOI: 10.1002/1521-4095(20020116)14:2<151::aid-adma151>3.0.co;2-n

[7] F.J. Meyer, M.C. Reuter, and R.M. Tromp, Growth dynamics of pentacene thin films, Nature 412 (2001) 517-520.

DOI: 10.1038/35087532

[8] J.Y. Lee, B.C. Lai, and H.S. Nalwa In Handbook of Thin Film Mater. Ed. Academic Press: San Diego, 2002, vol. 3 p.40.

[9] S. Suchitra, S. Mahanty, S. Roy, O. Heintz, S. Bourgeois, and D. Chaumont, Investigation on sol–gel synthesized Ag-doped TiO2 cermet thin films, Thin Solid Films 474 (2005) 245-249.

DOI: 10.1016/j.tsf.2004.04.004

[10] M. Zhang, Y. Bandos, and K. Wada, Growth of TiO2 nanorods by sol-gel template process, J. Mater. Sci. Lett. 20 (2001) 167.

[11] S. -Z. Chu, K. Wada, S. Inoue, and S.I. Todoroki, Synthesis and Characterization of Titania Nanostructures on Glass by Al Anodization and Sol−Gel Process, Chem. Mater. 14 (2002) 266-272.

DOI: 10.1021/cm0105918

[12] P. Lobl, M. Huppertz, and D. Mergel, Nucleation and growth in TiO2 films prepared by sputtering and evaporation, Thin Solid Films 251 (2000) 72-79.

DOI: 10.1016/0040-6090(94)90843-5

[13] T. Ishikawa, H. Yamaoka, Y. Harada, T. Fujii, and T. Nagasawa, A general process for in situ formation of functional surface layers on ceramics, Nature 416 (2002) 64-7.

DOI: 10.1038/416064a

[14] M. Addamo, V. augugliaro, A. Di Paola, E. G. Lopez, V. Loddo, G. Marci, and L. Palmisano, Photocatalytic thin films of TiO2 formed by a sol-gel process using titanium tetraisopropoxide as the precursor, Thin film solids 516 (2008) 3802-3807.

DOI: 10.1016/j.tsf.2007.06.139

[15] M.F. b Achoi, M.N. Asiah, M. Rusop, and S. Abdullah, The effect of growth temperature on the surface properties of TiO2 nanostructures grown on TiO2 templates, Trans. Mater. Research Soc. Jpn 36 (2011) 273-279.

DOI: 10.14723/tmrsj.36.273

[16] M.F. Achoi, M.N. Asiah, M. Rusop, and S. Abdullah, Nanoindentation testing for nanomultilayared spin coated TiO2/B2O3-SiO2, Jurnal Teknologi (Sciences & Engineering), Article in press (2012).