Laser Micromachining of Wide Bandgap Materials
Owing to the large photo energy, 157nm laser is considered as one of promising micro-fabrication tools. In this paper, a micromachining system based on the 157nm laser is introduced. 2D laser direct-writing and 3D micro-structuring experiments are carried out for silica glasses, fibers and diamond. For natural diamond, the ablation threshold by 157nm laser is about 2.0J/cm2. Material removal is dominantly due to photon-chemical effect for 157nm laser ablation. Effectiveness of using 157nm laser for 3D micromachining is clearly demonstrated.
Julong Yuan, Shiming Ji, Donghui Wen and Ming Chen
Y.T. Dai et al., "Laser Micromachining of Wide Bandgap Materials", Advanced Materials Research, Vols. 69-70, pp. 118-122, 2009