Laser Micromachining of Wide Bandgap Materials

Abstract:

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Owing to the large photo energy, 157nm laser is considered as one of promising micro-fabrication tools. In this paper, a micromachining system based on the 157nm laser is introduced. 2D laser direct-writing and 3D micro-structuring experiments are carried out for silica glasses, fibers and diamond. For natural diamond, the ablation threshold by 157nm laser is about 2.0J/cm2. Material removal is dominantly due to photon-chemical effect for 157nm laser ablation. Effectiveness of using 157nm laser for 3D micromachining is clearly demonstrated.

Info:

Periodical:

Advanced Materials Research (Volumes 69-70)

Edited by:

Julong Yuan, Shiming Ji, Donghui Wen and Ming Chen

Pages:

118-122

DOI:

10.4028/www.scientific.net/AMR.69-70.118

Citation:

Y.T. Dai et al., "Laser Micromachining of Wide Bandgap Materials", Advanced Materials Research, Vols. 69-70, pp. 118-122, 2009

Online since:

May 2009

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Price:

$35.00

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