3D Profile Measurement of Nanometer Cutting Edges of Single-Point Diamond Tools for Ultra-Precision Machining

Yoshikazu Arai; T. Asai; Sayeda Ferdous; Wei Gao

doi:10.4028/www.scientific.net/AMR.69-70.138

Paper Titles

Laser Micromachining of Wide Bandgap Materials
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Application of High Aspect Ratio Scanning Probe in Microstructure Measurement
p.123

Research on Prediction Model of Surface Roughness in Ultrasonic Polishing Nano-ZrO₂ Ceramics
p.128

Development of Elliptical Vibration Cutting Technology and its Application to Ultraprecision/Micro Machining of Hard/Brittle Materials
p.133

3D Profile Measurement of Nanometer Cutting Edges of Single-Point Diamond Tools for Ultra-Precision Machining
p.138

A New Internal Magnetic Field Assisted Machining Process Using a Magnetic Machining Jig-Machining Characteristics of Inside Finishing of a SUS304 Stainless Steel Tube
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Effect of Electrorheological Fluid Assistance on Micro Ultrasonic Machining
p.148

Preparation of MoS₂/Zr Coated High Speed Steel Tool and its Cutting Performance
p.153

Material Removal Mechanism in Vibration-Assisted Finishing
p.158

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 69-703D Profile Measurement of Nanometer Cutting Edges...

3D Profile Measurement of Nanometer Cutting Edges of Single-Point Diamond Tools for Ultra-Precision Machining

Abstract:

This paper describes an atomic force microscope (AFM) based instrument for 3D edge profile measurement of single-point diamond cutting tools. The instrument is composed of an AFM unit and an optical sensor for alignment of the AFM probe tip (silicon cantilever) with the diamond cutting tool edge. In the optical sensor, a laser beam from a laser diode along the Y-axis is focused to generate a small beam spot with a micrometer-order diameter at the beam waist, and then received by a photo-detector (photodiode). The tool edge top and the AFM probe tip are brought to the center of the beam waist in the XZ-plane through monitoring the variation of the photodiode output, respectively. Consequently, the AFM tip can be aligned with the tool edge top. Alignment experiments and 3D edge profile measurements of a round-nose type single-point diamond tool are carried out.