Materials Design and Analysis of Low-Power MEMS Microspeaker Using Magnetic Actuation Technology

Fatimah Lina Ayatollahi; Burhanuddin Yeop Majlis

doi:10.4028/www.scientific.net/AMR.74.243

Paper Titles

A Novel Piezoelectric Valveless Micropump with an Integrated Diffuser/Nozzle Bulge Piece Design
p.227

Characterization and Optimization of Seals-Off for Very Low Pressure Sensors (VLPS) Fabricated by CMOS MEMS Process
p.231

Evolutionary Algorithm Based Feedforward Control for Contouring of a Biaxial Piezo-Actuated Stage
p.235

Novel Design and Fabrication of High Sensitivity MEMS Capacitive Sensor Array for Fingerprint Imaging
p.239

Materials Design and Analysis of Low-Power MEMS Microspeaker Using Magnetic Actuation Technology
p.243

Prediction of Burr Formation in Fabricating MEMS Components by Micro End Milling
p.247

Parametric Study of Hot Embossing on Micro-Holes
p.251

Design and Fabrication of a MEMS-Based Gas Sensor
p.255

Fabrication of Reliable RF MEMS Switches in CPW Configuration
p.259

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 74Materials Design and Analysis of Low-Power MEMS...

Materials Design and Analysis of Low-Power MEMS Microspeaker Using Magnetic Actuation Technology

Abstract:

This paper presents material properties of a micromachined mesoscopic acoustic speaker for hearing aid applications. The microspeaker has a single turn copper coil on a polyimide membrane, and an NdFeB permanent magnet beneath the membrane. The fields due to the permanent magnet were computed using FEMM. Then, forces based on the fields and on the coil driving current were computed. Finally, IntelliSuite was employed to simulate membrane displacements and stresses. The device, with a polyimide membrane diameter of 2.5 mm and thickness of 2 µm, consumes 3.4 mW to generate a sound pressure level of 108 dB in the human ear.

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