Evolutionary Algorithm Based Feedforward Control for Contouring of a Biaxial Piezo-Actuated Stage

Chih Jer Lin; Shu Yin Chen

doi:10.4028/www.scientific.net/AMR.74.235

Paper Titles

Separation and Manipulation of Particles Using Traveling Wave Dielectrophoretic Force
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Performance Characterization of a Piezoelectric Micro SJA
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A Novel Piezoelectric Valveless Micropump with an Integrated Diffuser/Nozzle Bulge Piece Design
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Characterization and Optimization of Seals-Off for Very Low Pressure Sensors (VLPS) Fabricated by CMOS MEMS Process
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Evolutionary Algorithm Based Feedforward Control for Contouring of a Biaxial Piezo-Actuated Stage
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Novel Design and Fabrication of High Sensitivity MEMS Capacitive Sensor Array for Fingerprint Imaging
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Materials Design and Analysis of Low-Power MEMS Microspeaker Using Magnetic Actuation Technology
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Prediction of Burr Formation in Fabricating MEMS Components by Micro End Milling
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Parametric Study of Hot Embossing on Micro-Holes
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Evolutionary Algorithm Based Feedforward Control for Contouring of a Biaxial Piezo-Actuated Stage

Abstract:

The main objective of this paper is to establish a precision contouring control of a biaxial piezoelectric-actuated stage. The positioning accuracy of the piezoelectric-actuated stage is limited due to the hysteretic nonlinearity of the piezo-electric actuators (PEA). To compensate this hysteresis problem, a feedforward controller based on an evolution algorithm is proposed. The dynamics of the hysteresis is formulated by the Bouc-Wen model and the evolutionary algorithms (EAs) are studied to identify the optimal parameters of the Bouc-Wen model. To verify the consistency, two micro-contouring tasks are implemented by the proposed feedforward controller with the feedback of linear optical scales in DSP based real-time control architecture.