Performance Characterization of a Piezoelectric Micro SJA

An Shik Yang; Jeng Jong Ro; Wei Han Chang

doi:10.4028/www.scientific.net/AMR.74.223

Paper Titles

A Pendulum-Like Structure for Design of Oscillators
p.207

Design and Characterization of a Fourier Transform Micro-Spectrometer
p.211

Microstructure and Magnetic Properties of Rapidly Solidified Ni₂(Mn,Fe)Ga Heusler Alloys
p.215

Separation and Manipulation of Particles Using Traveling Wave Dielectrophoretic Force
p.219

Performance Characterization of a Piezoelectric Micro SJA
p.223

A Novel Piezoelectric Valveless Micropump with an Integrated Diffuser/Nozzle Bulge Piece Design
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Characterization and Optimization of Seals-Off for Very Low Pressure Sensors (VLPS) Fabricated by CMOS MEMS Process
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Evolutionary Algorithm Based Feedforward Control for Contouring of a Biaxial Piezo-Actuated Stage
p.235

Novel Design and Fabrication of High Sensitivity MEMS Capacitive Sensor Array for Fingerprint Imaging
p.239

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Performance Characterization of a Piezoelectric Micro SJA

Abstract:

This paper aims to explore the synthetic jet behavior for a dual-diaphragm piezoelectrically driven micro synthetic jet actuator. For a sinusoidal actuation cycle at an operating frequency of 648 Hz, the synthetic jet flow pattern was simulated and compared with the visualized image and measured centerline velocity distribution to validate the computer code. The far-field flow structure was similar to a common continuous turbulent air jet; whereas, the unsteady formation of a vortex pair was predicted in the near-field. Numerical experiments were extended to appraise performance of micro synthetic jet actuators by varying the driving voltage, width of the slot and depth of the actuator cavity.