Design and Characterization of a Fourier Transform Micro-Spectrometer
In this paper, we present a Fourier Transform micro-spectrometer which works based on a lamellar grating interferometer. The spectrometer model is electrostatically driven by parallel plate actuators which change the optical path difference (OPD) between movable grating facets and fixed ones. With a 200V input voltage, a maximum OPD of 48.7μm is achieved. The spectrum of a combined light source of a diode-pumped solid-state (DPSS) laser (λ=532.0nm) and a laser diode (λ=637.2nm) is experimentally acquired to demonstrate the performance of the model. The reconstructed spectrum displays two separate spectral peaks at 530.5nm and 635.2nm and the corresponding full-width at half-maximum (FWHM) resolutions are 9.8nm and 12.8nm respectively, indicating good wavelength accuracy and optical resolution.
Selin Teo, A. Q. Liu, H. Li and B. Tarik
S. H. Wang et al., "Design and Characterization of a Fourier Transform Micro-Spectrometer", Advanced Materials Research, Vol. 74, pp. 211-214, 2009