A Pendulum-Like Structure for Design of Oscillators

Venkatesh Chenniappan; Reza Moheimani; Mehmet Yuce

doi:10.4028/www.scientific.net/AMR.74.207

Paper Titles

Bandstop Filters with Comb-Like Electromagnetic Bandgap Structures on CPW Stubs
p.189

An On-Chip Micro-Droplet Optical Filter Using Evanescent Wave Coupling
p.193

Numerical Simulation of Stretchable and Foldable Silicon Integrated Circuits
p.197

Design and Analysis of Micromixers on a Centrifugal Platform
p.203

A Pendulum-Like Structure for Design of Oscillators
p.207

Design and Characterization of a Fourier Transform Micro-Spectrometer
p.211

Microstructure and Magnetic Properties of Rapidly Solidified Ni₂(Mn,Fe)Ga Heusler Alloys
p.215

Separation and Manipulation of Particles Using Traveling Wave Dielectrophoretic Force
p.219

Performance Characterization of a Piezoelectric Micro SJA
p.223

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 74A Pendulum-Like Structure for Design of...

A Pendulum-Like Structure for Design of Oscillators

Abstract:

A novel MEMS resonator employing “capacitance-shaping” principle to generate sinusoidal signals is proposed. FEM simulations are done to study the structure. Preliminary characterizations on devices fabricated through SOI-MUMPS are carried-out to study the frequency tuning of the resonator by electrostatic actuation. Variants of the proposed structure are presented. Second order dynamical models of the devices are derived.