A Pendulum-Like Structure for Design of Oscillators

Abstract:

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A novel MEMS resonator employing “capacitance-shaping” principle to generate sinusoidal signals is proposed. FEM simulations are done to study the structure. Preliminary characterizations on devices fabricated through SOI-MUMPS are carried-out to study the frequency tuning of the resonator by electrostatic actuation. Variants of the proposed structure are presented. Second order dynamical models of the devices are derived.

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Periodical:

Edited by:

Selin Teo, A. Q. Liu, H. Li and B. Tarik

Pages:

207-210

DOI:

10.4028/www.scientific.net/AMR.74.207

Citation:

V. Chenniappan et al., "A Pendulum-Like Structure for Design of Oscillators", Advanced Materials Research, Vol. 74, pp. 207-210, 2009

Online since:

June 2009

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$35.00

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