A Pendulum-Like Structure for Design of Oscillators
A novel MEMS resonator employing “capacitance-shaping” principle to generate sinusoidal signals is proposed. FEM simulations are done to study the structure. Preliminary characterizations on devices fabricated through SOI-MUMPS are carried-out to study the frequency tuning of the resonator by electrostatic actuation. Variants of the proposed structure are presented. Second order dynamical models of the devices are derived.
Selin Teo, A. Q. Liu, H. Li and B. Tarik
V. Chenniappan et al., "A Pendulum-Like Structure for Design of Oscillators", Advanced Materials Research, Vol. 74, pp. 207-210, 2009