Paper Title:
A Pendulum-Like Structure for Design of Oscillators
  Abstract

A novel MEMS resonator employing “capacitance-shaping” principle to generate sinusoidal signals is proposed. FEM simulations are done to study the structure. Preliminary characterizations on devices fabricated through SOI-MUMPS are carried-out to study the frequency tuning of the resonator by electrostatic actuation. Variants of the proposed structure are presented. Second order dynamical models of the devices are derived.

  Info
Periodical
Edited by
Selin Teo, A. Q. Liu, H. Li and B. Tarik
Pages
207-210
DOI
10.4028/www.scientific.net/AMR.74.207
Citation
V. Chenniappan, R. Moheimani, M. Yuce, "A Pendulum-Like Structure for Design of Oscillators", Advanced Materials Research, Vol. 74, pp. 207-210, 2009
Online since
June 2009
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$35.00
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