Compatibility Study of Diamond-Like Nanocomposite Thin Films with Hydrazine Propellant for MEMS Microthruster
p.269
p.269
Parametric Study of Femtosecond Pulses Laser Hole Drilling of Silicon Wafer
p.273
p.273
Piezoeletric Micropump for Drug Delivery System Fabricated Using Two Optical Masks
p.279
p.279
Hybrid Simulation Approach on MEMS Piezoresistive Microcantilever Sensor for Biosensing Applications
p.283
p.283
Fabrication of Glucose Sensitive Actuator for DDS Micro Valve
p.287
p.287
Chain Length Dependence of SAMs-Assisted Copper Thermocompression Bonding
p.291
p.291
Analysis of In-Phase Coupling Error in the Vibratory MEMS Gyroscope with Various Vacuum Degrees
p.295
p.295
Kinetic Analysis of UV-Curable Epoxy Resins for Micromachining Applications
p.299
p.299
Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography
p.303
p.303
Fabrication of Glucose Sensitive Actuator for DDS Micro Valve
Abstract:
A glucose sensitive actuator for drug delivery system (DDS) consists of silicon boss, micro channel and outlet of the microvalve.The microchannel is essential to carry liquid samples in the system. In this paper, two types of microchannel, rectangular and trapezoidal, were fabricated using anisotropic etching of Deep-RIE and wet chemical etching using KOH solution, respectively. Fabrication were done for micro channels with cross sectional width of 100 -120µm width and length of 2 mm.
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Periodical:
Advanced Materials Research (Volume 74)
Pages:
287-290
Citation:
Online since:
June 2009
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