Fabrication of Glucose Sensitive Actuator for DDS Micro Valve
A glucose sensitive actuator for drug delivery system (DDS) consists of silicon boss, micro channel and outlet of the microvalve.The microchannel is essential to carry liquid samples in the system. In this paper, two types of microchannel, rectangular and trapezoidal, were fabricated using anisotropic etching of Deep-RIE and wet chemical etching using KOH solution, respectively. Fabrication were done for micro channels with cross sectional width of 100 -120µm width and length of 2 mm.
Selin Teo, A. Q. Liu, H. Li and B. Tarik
N. A. Dzulkefli et al., "Fabrication of Glucose Sensitive Actuator for DDS Micro Valve", Advanced Materials Research, Vol. 74, pp. 287-290, 2009