Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography
Low temperature co-fired ceramic (LTCC) process combined with thick film photolithography was employed to fabricate ceramic-based microfluidic devices. To check the applicability of novel process, three types of passive mixers, diffusion-driven T-type mixers with different channel width and convection-driven chaotic mixer, were fabricated and their microfluidic performance was evaluated. It was confirmed that the degree of mixing in ceramic-based microfluidic passive mixers was well matched with the numerical simulation data.
Selin Teo, A. Q. Liu, H. Li and B. Tarik
Y. J. Yoon et al., "Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography", Advanced Materials Research, Vol. 74, pp. 303-306, 2009