Paper Title:
Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography
  Abstract

Low temperature co-fired ceramic (LTCC) process combined with thick film photolithography was employed to fabricate ceramic-based microfluidic devices. To check the applicability of novel process, three types of passive mixers, diffusion-driven T-type mixers with different channel width and convection-driven chaotic mixer, were fabricated and their microfluidic performance was evaluated. It was confirmed that the degree of mixing in ceramic-based microfluidic passive mixers was well matched with the numerical simulation data.

  Info
Periodical
Edited by
Selin Teo, A. Q. Liu, H. Li and B. Tarik
Pages
303-306
DOI
10.4028/www.scientific.net/AMR.74.303
Citation
Y. J. Yoon, J. K. Choi, J. W. Lim, H. T. Kim, J. H. Kim, Y. S. Choi, J. H. Lee, J. H. Kim, "Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography", Advanced Materials Research, Vol. 74, pp. 303-306, 2009
Online since
June 2009
Export
Price
$35.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Jin Xian Wang, Zeng Wen, Song Jing Li
Chapter 4: Advanced Control Research and Application
Abstract:A pneumatic microvalve which can be used in pneumatic pressure control for lab-on-a-chip applications is presented in this paper. In order to...
244
Authors: Chun Hui Chung, Yann Jiun Chen
Abstract:Polymer materials have been utilized in microfluidic devices because of their properties and competitive cost for single-use devices....
120
Authors: Bin Xian Shen, Wei Qiang Liu
Abstract:Platelet mixer is a type of high-efficient equipment which can mix fluids through platelet micro-channels by cross-bedded injection. It...
98