Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography

Young Joon Yoon; Jae Kyung Choi; Jong Woo Lim; Hyo Tae Kim; Ji Hoon Kim; Youn Suk Choi; Jong Heun Lee; Jong Hee Kim

doi:10.4028/www.scientific.net/AMR.74.303

Paper Titles

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Chain Length Dependence of SAMs-Assisted Copper Thermocompression Bonding
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Analysis of In-Phase Coupling Error in the Vibratory MEMS Gyroscope with Various Vacuum Degrees
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Kinetic Analysis of UV-Curable Epoxy Resins for Micromachining Applications
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Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography
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Characteristics of Biodegradable Implantable Drug Delivery System with Micro-Porous Structure
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Transfer Technology of Ferroelectric Films onto the Polymer Substrate for the Application of High Density Capacitor
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Tunable Optical Filter by Thermal Effect Based on MEMS Technology
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Thermal Management and Alignment Strategies in MEMS Tunable Laser Packaging
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Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography

Abstract:

Low temperature co-fired ceramic (LTCC) process combined with thick film photolithography was employed to fabricate ceramic-based microfluidic devices. To check the applicability of novel process, three types of passive mixers, diffusion-driven T-type mixers with different channel width and convection-driven chaotic mixer, were fabricated and their microfluidic performance was evaluated. It was confirmed that the degree of mixing in ceramic-based microfluidic passive mixers was well matched with the numerical simulation data.