Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography

Abstract:

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Low temperature co-fired ceramic (LTCC) process combined with thick film photolithography was employed to fabricate ceramic-based microfluidic devices. To check the applicability of novel process, three types of passive mixers, diffusion-driven T-type mixers with different channel width and convection-driven chaotic mixer, were fabricated and their microfluidic performance was evaluated. It was confirmed that the degree of mixing in ceramic-based microfluidic passive mixers was well matched with the numerical simulation data.

Info:

Periodical:

Edited by:

Selin Teo, A. Q. Liu, H. Li and B. Tarik

Pages:

303-306

DOI:

10.4028/www.scientific.net/AMR.74.303

Citation:

Y. J. Yoon et al., "Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography", Advanced Materials Research, Vol. 74, pp. 303-306, 2009

Online since:

June 2009

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Price:

$35.00

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