Transfer Technology of Ferroelectric Films onto the Polymer Substrate for the Application of High Density Capacitor

Masaaki Ichiki; Ryutaro Maeda; Tadatomo Suga

doi:10.4028/www.scientific.net/AMR.74.311

Paper Titles

Analysis of In-Phase Coupling Error in the Vibratory MEMS Gyroscope with Various Vacuum Degrees
p.295

Kinetic Analysis of UV-Curable Epoxy Resins for Micromachining Applications
p.299

Microfluidic Devices Fabricated by LTCC Combined with Thick Film Lithography
p.303

Characteristics of Biodegradable Implantable Drug Delivery System with Micro-Porous Structure
p.307

Transfer Technology of Ferroelectric Films onto the Polymer Substrate for the Application of High Density Capacitor
p.311

Tunable Optical Filter by Thermal Effect Based on MEMS Technology
p.315

Thermal Management and Alignment Strategies in MEMS Tunable Laser Packaging
p.319

UV-Visible Spectra Character of Larger Diameter of Gold Nanoparticles (AuNPs)
p.323

Numerical Modeling of Spiral Micro-Mixers
p.327

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 74Transfer Technology of Ferroelectric Films onto...

Transfer Technology of Ferroelectric Films onto the Polymer Substrate for the Application of High Density Capacitor

Abstract:

High dielectric capacitors , that has around 1000 in dielectric constant, can be successfully formed by nanotransfer on non-heat-resisting substrates. PZT film could be released from the Si substrate and bonded onto the polymer one. The releasing characteristics have the relationships with the thickness of Pt layer. The formed PZT has perovskite structure and clear columnar texture.