Reliability Research of Capacitive RF-MEMS Switch

Ming Xin Song; Rui Wu; Qian Liu; Hong Wang; Zuo Bao Cao; Ming Hua Chen; Jing Hua Yin

doi:10.4028/www.scientific.net/AMR.753-755.2507

Paper Titles

A Portable ECG Monitor with High Resolution Based on Cortex-M3
p.2489

Exploration of Humidity Data Acquisition System Based on Single Chip Microcomputer
p.2494

A Design of SIMD Core Based on PIM Technology
p.2498

Application of Graph and Model Integrative Technology in Power Communication Network Management
p.2503

Reliability Research of Capacitive RF-MEMS Switch
p.2507

A New Method for Electronic Circuit Fault Knowledge Acquisition Using PSPICE
p.2511

Optimization of the Au Stud Bump Number for the Flip-Chip Packaged InGaN LEDs
p.2515

White Organic Light-Emitting Devices Using the Blue and Green Fluorescent Emitting Layer Structure Incorporating with Red Phosphorescent Emitting Layer
p.2521

Design of UHVDC Wall Bushing and its Electric Field Simulation
p.2526

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 753-755Reliability Research of Capacitive RF-MEMS Switch

Reliability Research of Capacitive RF-MEMS Switch

Abstract:

This paper presents the model of capacitive RF-MEMS switch for the lifetime prediction. The model is based on dielectric charging failure mechanism. The simulation results show that lifetime can reach 1000 hours when elastic coefficient (K) adopts 4-16N/m, Si₃N₄ as dielectric material, 0.4-1μm of dielectric thickness, 2-5μm of plate distance, less than 20V of driven voltage.

You might also be interested in these eBooks

Materials Processing and Manufacturing III

View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 753-755)

Pages:

2507-2510

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.753-755.2507

Citation:

Cite this paper

Online since:

August 2013

Authors:

Ming Xin Song, Rui Wu, Qian Liu, Hong Wang, Zuo Bao Cao, Ming Hua Chen, Jing Hua Yin

Keywords:

Dielectric Charging, Lifetime, Rf MEMS Switch

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] ISRAELACHVILI J N. Intermolecular and surface forces, Academic Press, London, U. K. (2010).

Google Scholar

[2] WIVVELER J, PFEIFER G, HIETSCHOLD M. Parasitic charging of dielectric surfaces in capacitive micro electro mechanical systems (MEMS), Sensors and Actuators. 2008, A71: 74-80.

DOI: 10.1016/s0924-4247(98)00155-1

Google Scholar

[3] BARBER J R, CIAVARELLA M. Contact mechanics. International Journal of Solids and Structures, 2011, 37: 29-43.

Google Scholar

[4] MAJUMDAR A, TIEN C L. Fractal characterization and simulation of rough surfaces. Wear. 2009. 136: 313-327.

DOI: 10.1016/0043-1648(90)90154-3

Google Scholar