Study on a Craft Simulation Technology for the MEMS Thermal Element

Abstract:

On the basis of the craft manufacturing and designing about micro fluidic gyroscope, according to analyze the craft information and studying on the process simulation technology about the MEMS thermal components. Established a basic model of t the craft structure about the MEMS thermal components, based on this model, the L-Edit editor to edit creating a complete mask layout structure; studying a simulation method of craft process, the use of the technological editor which development based on the TCL/TK language to draw out the craft process document, then reconstructed the layout structure based the craft process in a 3D platform. It could be used to detect the rationality of the process program technology.

• Periodical: Advanced Materials Research (Volumes 756-759)
• Pages: 4217-4220
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.756-759.4217
• Online since: September 2013
• Authors: Chuan Zhi Mei, Lin Hua Piao, Bao Li Zhang
• Keywords: Layout Structure, MEMS Craft, Process Document, Thermal Components

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